Method for dicing wafer and process for manufacturing liquid-discharging head using the dicing method

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United States of America Patent

PATENT NO 7569118
APP PUB NO 20050241754A1
SERIAL NO

11113665

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Abstract

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A method for dicing a wafer having a first face in which opening are arranged along dicing streets. The method includes a step of affixing a dicing tape to the first face such that the dicing tape lies over the openings and adhesive regions of the dicing tape are exposed in the openings and a step of treating the dicing tape to reduce the adhesive strength of the adhesive regions.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inada, Genji Kawasaki , JP 52 796
Iri, Junichiro Kawasaki , JP 46 219
Kashino, Toshio Fujisawa , JP 187 3423

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