Method and apparatus for forming a thin-film solar cell using a continuous process
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United States of America Patent
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Aug 18, 2009
Grant Date -
May 11, 2006
app pub date -
Nov 10, 2005
filing date -
Nov 10, 2004
priority date (Note) -
Expired
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Abstract
The present invention relates to new methods for manufacturing photovoltaic devices and an apparatus for practicing those methods of manufacture. The present invention employs a transfer-through system for advancing work piece substrates through an integrated apparatus of multiple treatment chambers that control each of the manufacturing processes.
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