Fluid injection devices with sensors, fluid injection system and method of analyzing fluid in fluid injection devices
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United States of America Patent
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Aug 25, 2009
Grant Date -
Feb 22, 2007
app pub date -
Aug 16, 2006
filing date -
Aug 17, 2005
priority date (Note) -
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Abstract
A fluid injection device integrating a piezoelectric sensor, a fluid injection apparatus and a method for analyzing fluid content in a fluid injection device. The fluid injection device comprises a fluid injector and a piezoelectric sensor. The fluid injector comprises a plurality of fluid chambers formed in a substrate for receiving fluid. A structural layer is disposed on the substrate and the plurality of fluid chambers. At least one fluid actuator is disposed on the structural layer opposing each fluid chamber. A nozzle is adjacent to the at least one fluid actuator and connecting each fluid chamber through the structural layer. The piezoelectric sensor id disposed on the structural layer to analyze fluid content in each fluid chamber.
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