Probe holder for a probe for testing semiconductor components
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United States of America Patent
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Aug 25, 2009
Issued Date -
N/A
app pub date -
Feb 13, 2007
filing date -
Nov 29, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.
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