Chromatic compensation in Fizeau interferometer

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United States of America Patent

PATENT NO 7580135
APP PUB NO 20070296978A1
SERIAL NO

11821223

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Abstract

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The focus of the collimating lens in the optical train of a Fizeau interferometer is adjusted to change the power of the test beam illuminating the transmission sphere. As a result, the rays can be made sufficiently perpendicular to the reference surface to eliminate the chromatic focus shift and non-common path errors produced by a light source of wavelength different from the design wavelength of the transmission sphere. By making the position of the collimating lens relative to the beam expander adjustable along the optical axis over some small range, illumination sources of various wavelength can be used in the same interferometer.

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Patent Owner(s)

Patent OwnerAddress
ONTO INNOVATION INC16 JONSPIN ROAD WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayes, John Tucson , US 410 12298

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