Parameter adjuster
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United States of America Patent
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Aug 25, 2009
Grant Date -
Jul 20, 2006
app pub date -
Jul 15, 2004
filing date -
Jul 16, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A chromosome using each of a plurality of parameters of a physical model of a semiconductor element as a gene is defined and the parameters are optimized using a genetic algorithm based on the characteristics measurement data of the semiconductor element fabricated by way of trial. In the selection processing of the genetic algorithm, a sum of a first evaluation value based on linear scale data and a second evaluation value based on logarithmic scale data is employed as the evaluation value of the chromosome.
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