Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes
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United States of America Patent
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Sep 1, 2009
Grant Date -
Apr 28, 2005
app pub date -
Oct 10, 2003
filing date -
Oct 10, 2003
priority date (Note) -
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Abstract
A reactor comprising an energy source, a plasma unit positioned relative to the energy source, and a processing vessel connected to the plasma unit. The energy source has a generator that produces a plasma energy and a transmitter to transmit the plasma energy. The plasma unit has a first portion or transmissive portion through which the plasma energy can propagate, a second portion or distributor portion having a plurality of outlets, and a chamber in fluid communication with the plurality of outlets. The chamber is generally between or within the first and second portions. The plasma energy can pass through at least the first portion and into the chamber to create a plasma in the chamber. The second portion can also be transmissive or opaque to the plasma energy. The processing vessel includes a workpiece holder across from the outlets of the second portion of the plasma unit.
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