Method for manufacturing semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7582554
APP PUB NO 20070275553A1
SERIAL NO

11798734

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A method for manufacturing a semiconductor device according to the present invention includes the steps of providing a semiconductor substrate in which an element isolation region and active regions surrounded by the element isolation region are formed, forming a plurality of conductive lines disposed such that the conductive lines cross the active regions, forming an insulating film over the entire surface including the conductive lines, and etching away the insulating film situated over the active regions between the conductive lines so as to form contact holes. After an anti-etching film is formed to protect the surfaces in the contact holes, wet etching is conducted to remove the insulating film in the contact holes so as to form the contact holes.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
RAMBUS INC.LOS ALTOS, CA1510

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Moriwaki, Yoshikazu Tokyo , JP 11 58

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (2)
* 2003/0211,673 Dynamic random access memory with improved contact arrangements 5 2003
* 2005/0237,847 Semiconductor device with source line and fabrication method thereof 8 2005
 
TOSHIBA MEMORY CORPORATION (1)
* 7309891 Non-volatile and memory semiconductor integrated circuit 8 2005
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
* 6873010 High performance logic and high density embedded dram with borderless contact and antispacer 7 2003
 
POLARIS INNOVATIONS LIMITED (1)
* 6121098 Semiconductor manufacturing method 27 1998
 
NANYA TECHNOLOGY CORPORATION (3)
* 6780739 Bit line contact structure and method for forming the same 4 2003
* 7094672 Method for forming self-aligned contact in semiconductor device 4 2004
* 2006/0118,886 Method of forming bit line contact via 1 2006
 
MICRON TECHNOLOGY, INC. (4)
* 6858934 Semiconductor device structures including metal silicide interconnect structures that extend at least partially over transistor gate structures and methods for making the same 4 2001
* 6770927 Structures comprising transistor gates 8 2002
* 7141511 Method and apparatus for fabricating a memory device with a dielectric etch stop layer 1 2004
* 6927170 Methods for making semiconductor device structures with capacitor containers and contact apertures having increased aspect ratios 21 2004
 
FREESCALE SEMICONDUCTOR, INC. (1)
* 5158910 Process for forming a contact structure 62 1990
 
GLOBALFOUNDRIES INC. (1)
* 6335248 Dual workfunction MOSFETs with borderless diffusion contacts for high-performance embedded DRAM technology 17 2001
 
SAMSUNG ELECTRONICS CO., LTD. (4)
* 6461911 Semiconductor memory device and fabricating method thereof 65 2001
* 2006/0154,460 Self-aligned contact method 6 2005
* 2007/0001,212 NAND-type memory devices including recessed source/drain regions and related methods 8 2006
* 7329918 Semiconductor memory device including storage nodes and resistors and method of manufacturing the same 5 2006
 
ROUND ROCK RESEARCH, LLC (1)
* 2005/0158,949 Semiconductor devices 55 2005
 
RENESAS TECHNOLOGY CORP. (1)
* 2004/0175,908 Method for manufacturing semiconductor device having gate electrode 2 2003
 
NEC CORPORATION (1)
* 5308792 Method for fabricating semiconductor device 16 1992
 
UNITED MICROELECTRONICS CORP. (2)
* 6077763 Process for fabricating a self-aligned contact 12 1996
* 6683342 Memory structure and method for manufacturing the same 2 2002
 
PS4 LUXCO S.A.R.L. (1)
* 6800543 Semiconductor device having a low-resistance gate electrode 12 2002
 
RENESAS ELECTRONICS CORPORATION (2)
* 6690053 Shared contact in a semiconductor device in which DRAMs and SRAMs are combined and method of manufacturing the same 10 2002
* 2007/0215,930 Semiconductor device and a method of manufacturing the same 6 2007
 
LONGITUDE SEMICONDUCTOR S.A.R.L. (1)
* 6258649 Semiconductor integrated circuit device and method of manufacturing the same 48 1999
 
TEXAS INSTRUMENTS INCORPORATED (3)
* 5407860 Method of forming air gap dielectric spaces between semiconductor leads 100 1994
* 6054769 Low capacitance interconnect structures in integrated circuits having an adhesion and protective overlayer for low dielectric materials 27 1997
* 6528835 Titanium nitride metal interconnection system and method of forming the same 9 2000
 
KABUSHIKI KAISHA TOSHIBA (7)
* 6608356 Semiconductor device using damascene technique and manufacturing method therefor 10 1997
* 6153476 Semiconductor device and method for manufacturing the same 31 1998
* 6310374 Nonvolatile semiconductor memory device having extracting electrode 30 1998
* 6483138 Semiconductor apparatus formed by SAC (self-aligned contact) 1 2000
* 6790723 Semiconductor device and method of manufacturing the same 10 2001
* 7166889 Semiconductor memory device having a gate electrode and a method of manufacturing thereof 13 2003
* 7064394 Nonvolatile semiconductor memory device 1 2005
 
WINBOND ELECTRONICS CORP. (1)
* 5668065 Process for simultaneous formation of silicide-based self-aligned contacts and local interconnects 55 1996
 
HYNIX SEMICONDUCTOR INC. (2)
* 6699746 Method for manufacturing semiconductor device 6 2002
* 7045450 Method of manufacturing semiconductor device 2 2004
 
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION (1)
* 5792687 Method for fabricating high density integrated circuits using oxide and polysilicon spacers 100 1996
 
TOKYO ELECTRON LIMITED (1)
* 7030029 Method of high selectivity SAC etching 4 2001
 
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. (2)
* 2002/0081,799 CONTACT FABRICATION METHOD FOR SEMICONDUCTOR DEVICE 5 1998
* 6271113 Method for forming wiring in semiconductor device 6 1999
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
SAMSUNG ELECTRONICS CO., LTD. (1)
* 9768053 Active structures of a semiconductor device and methods of manufacturing the same 0 2015
 
RAMBUS INC. (2)
* 7767569 Method of manufacturing semiconductor device 1 2006
* 2007/0096,188 Method of manufacturing semiconductor device 1 2006
* Cited By Examiner

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