Method for redirecting void diffusion away from vias in an integrated circuit design

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United States of America Patent

PATENT NO 7582566
APP PUB NO 20080132065A1
SERIAL NO

12018849

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Abstract

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A method for redirecting void diffusion away from vias in an integrated circuit design includes steps of forming an electrical conductor in a first electrically conductive layer of an integrated circuit design, forming a via between a distal end of the electrical conductor and a second electrically conductive layer of the integrated circuit design, and reducing tensile stress in the electrical conductor to divert void diffusion away from the via.

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Patent Owner(s)

Patent OwnerAddress
BELL SEMICONDUCTOR LLCONE WEST BROAD STREET SUITE 901 BETHLEHEM PA 18018

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Allman, Derryl D J Camas , US 74 1927
Bhatt, Hemanshu D Vancouver , US 27 296
Burke, Peter Austin Portland , US 5 91
Kwak, Byung-Sung Portland , US 36 197
May, Charles E Fairview , US 118 2229
Price, David T Gresham , US 39 331
Pritchard, David Saxony , DE 69 396
Sun, Sey-Shing Portland , US 43 579

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