US Patent No: 7,582,848

Number of patents in Portfolio can not be more than 2000

Energy-efficient, laser-based method and system for processing target material

ALSO PUBLISHED AS: 20060086702

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Abstract

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An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp rise time, a pulse duration and a fall time. The system further includes a beam delivery and focusing subsystem for delivering and focusing at least a portion of the amplified pulse train onto the target material. The rise time (less than about 1 ns) is fast enough to efficiently couple laser energy to the target material, the pulse duration (typically 2-10 ns) is sufficient to process the target material, and the fall time (a few ns) is rapid enough to prevent the undesirable changes to the material surrounding the target material.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ELECTRO SCIENTIFIC INDUSTRIES, INC.PORTLAND, OR429

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Smart, Donald V Boston, MA 79 1388

Cited Art Landscape

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Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
DISCO CORPORATION (1)
8,314,014 Laser processing apparatus and laser processing method 0 2010
 
PICODEON LTD OY (1)
8,741,749 Semiconductor and an arrangement and a method for producing a semiconductor 0 2007

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