Energy-efficient, laser-based method and system for processing target material

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7582848
APP PUB NO 20060086702A1
SERIAL NO

11305129

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp rise time, a pulse duration and a fall time. The system further includes a beam delivery and focusing subsystem for delivering and focusing at least a portion of the amplified pulse train onto the target material. The rise time (less than about 1 ns) is fast enough to efficiently couple laser energy to the target material, the pulse duration (typically 2-10 ns) is sufficient to process the target material, and the fall time (a few ns) is rapid enough to prevent the undesirable changes to the material surrounding the target material.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ELECTRO SCIENTIFIC INDUSTRIES, INC.PORTLAND, OR424

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Smart, Donald V Boston , US 52 1764

Cited Art Landscape

Patent Info (Count) # Cites Year
 
SCIENCE & TECHNOLOGY DEVELOPMENT CORPORATION @ UNM (1)
5175664 Discharge of lightning with ultrashort laser pulses 41 1991
 
Other [Check patent profile for assignment information] (5)
5280491 Two dimensional scan amplifier laser 37 1991
5848080 Short pulsewidth high pulse repetition frequency laser 35 1997
6210401 Method of, and apparatus for, surgery of the cornea 186 1998
* 6482199 Method and apparatus for high precision variable rate material, removal and modification 85 2000
6552301 Burst-ultrafast laser machining method 92 2001
 
GENERAL ATOMICS (1)
6664498 Method and apparatus for increasing the material removal rate in laser machining 59 2002
 
New Wave Research (1)
5811751 Multi-wavelength laser system, probe station and laser cutter system using the same 141 1997
 
PANASONIC CORPORATION OF NORTH AMERICA (1)
5786560 3-dimensional micromachining with femtosecond laser pulses 135 1997
 
MICROLINE TECHNOLOGIES, INC. (1)
5759428 Method of laser cutting a metal line on an MR head 42 1996
 
DAINIPPON SCREEN MFG. CO., LTD. (1)
4432613 Exposure light beams control method for use in a picture reproducing machine 12 1981
 
STC, plc (1)
4602852 Acousto-optic deflector systems 27 1984
 
NANYANG TECHNOLOGICAL UNIVERSITY (1)
6285002 Three dimensional micro machining with a modulated ultra-short laser pulse 121 1999
 
Clark-MXR, Inc. (1)
5592327 Regenerative amplifier incorporating a spectral filter within the resonant cavity 106 1995
 
HITACHI, LTD. (1)
5208437 Method of cutting interconnection pattern with laser and apparatus thereof 62 1991
 
AISIN SEIKI KABUSHIKI KAISHA (2)
5920668 Compact fiber laser unit 57 1997
6208458 Quasi-phase-matched parametric chirped pulse amplification systems 137 1998
 
SANDIA CORPORATION (1)
5864430 Gaussian beam profile shaping apparatus, method therefor and evaluation thereof 78 1996
 
ETHICON, INC. (1)
6252195 Method of forming blind holes in surgical needles using a diode pumped Nd-YAG laser 32 1999
 
ELECTRO SCIENTIFIC INDUSTRIES, INC. (33)
4930901 Method of and apparatus for modulating a laser beam 50 1989
5197074 Multi-function intra-resonator loss modulator and method of operating same 58 1991
5265114 System and method for selectively laser processing a target structure of one or more materials of a multimaterial, multilayer device 77 1992
5473624 Laser system and method for selectively severing links 45 1994
5569398 Laser system and method for selectively trimming films 77 1994
5685995 Method for laser functional trimming of films and devices 45 1995
5751585 High speed, high accuracy multi-stage tool positioning system 118 1996
* 5841099 Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets 133 1996
5847960 Multi-tool positioning system 81 1996
5998759 Laser processing 89 1996
6025256 Laser based method and system for integrated circuit repair or reconfiguration 43 1997
6057180 Method of severing electrically conductive links with ultraviolet laser output 149 1998
6300590 Laser processing 39 1998
6341029 Method and apparatus for shaping a laser-beam intensity profile by dithering 45 1999
6281471 Energy-efficient, laser-based method and system for processing target material 177 1999
6462306 System and method for material processing using multiple laser beams 48 2000
6433301 Beam shaping and projection imaging with solid state UV Gaussian beam to form vias 83 2000
6340806 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train 116 2000
6574250 Laser system and method for processing a memory link with a burst of laser pulses having ultrashort pulse widths 173 2001
6727458 Energy-efficient, laser-based method and system for processing target material 79 2001
2002/0063,361 Laser processing of alumina or metals on or embedded therein 24 2001
6703582 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train 44 2002
2002/0167,581 Methods and systems for thermal-based laser processing a multi-material device 100 2002
6784399 Micromachining with high-energy, intra-cavity Q-switched CO2 laser pulses 25 2002
6887804 Passivation processing over a memory link 120 2003
6911622 Laser processing 6 2003
2004/0134,896 Laser-based method and system for memory link processing with picosecond lasers 57 2003
2004/0188,399 Energy-efficient, laser-based method and system for processing target material 45 2004
6878899 Laser processing 31 2004
2005/0279,739 Semiconductor structure processing using multiple laser beam spots spaced on-axis to increase single-blow throughput 21 2005
2006/0086,702 Energy-efficient, laser-based method and system for processing target material 22 2005
2007/0199,927 Laser-based method and system for removing one or more target link structures 30 2007
2008/0035,614 ENERGY EFFICIENT, LASER-BASED METHOD AND SYSTEM FOR PROCESSING TARGET MATERIAL 18 2007
 
NORTHROP GRUMMAN CORPORATION (1)
4742522 Free-electron laser system with raman amplifier outcoupling 23 1987
 
LOCKHEED MARTIN CORPORATION (2)
4780177 Excimer laser patterning of a novel resist 112 1988
6541731 Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates 78 2001
 
MRF, INC. (1)
5520679 Ophthalmic surgery method using non-contact scanning laser 223 1994
 
RAYTHEON COMPANY (1)
5974060 Multi-mode laser oscillator with large intermode spacing 70 1999
 
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC. (1)
5558789 Method of applying a laser beam creating micro-scale surface structures prior to deposition of film for increased adhesion 43 1994
 
CANON KABUSHIKI KAISHA (1)
5739590 Semiconductor device having improved surface evenness 19 1995
 
COUNCIL FOR THE CENTRAL LABORATORY OF THE RESEARCH COUNCIL (1)
5654998 Laser-excited X-ray source 24 1995
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (2)
4414059 Far UV patterning of resist materials 138 1982
5374590 Fabrication and laser deletion of microfuses 49 1993
 
NIKON CORPORATION (2)
6901090 Exposure apparatus with laser device 40 2000
6947123 Exposure device with laser device 21 2000
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (2)
5475527 Fourier plane image amplifier 18 1994
6421166 Compact, flexible, frequency agile parametric wavelength converter 31 2000
 
E. I. DU PONT DE NEMOURS AND COMPANY (1)
5293025 Method for forming vias in multilayer circuits 91 1991
 
MCDONNELL DOUGLAS CORPORATION (1)
5694408 Fiber optic laser system and associated lasing method 146 1996
 
CORNELL UNIVERSITY (1)
5034951 Femtosecond ultraviolet laser using ultra-thin beta barium borate 42 1990
 
GLOBALFOUNDRIES INC. (1)
* 5966339 Programmable/reprogrammable fuse 32 1998
 
CHROMAPLEX, INC. (1)
2004/0057,475 High-power pulsed laser device 38 2002
 
GSI LUMONICS CORPORATION (7)
5300756 Method for severing integrated-circuit connection paths by a phase-plate-adjusted laser beam 62 1991
2004/0134,894 Laser-based system for memory link processing with picosecond lasers 59 2003
2005/0092,720 Laser-based method and system for memory link processing with picosecond lasers 21 2004
2005/0115,936 Laser-based method and system for memory link processing with picosecond lasers 13 2004
2005/0115,937 Laser-based method and system for memory link processing with picosecond lasers 16 2004
2005/0150,879 Laser-based method and system for memory link processing with picosecond lasers 13 2004
2005/0150,880 Laser-based method and system for memory link processing with picosecond lasers 15 2004
 
SPECTRA-PHYSICS LASERS, INC. (1)
4646308 Synchronously pumped dye laser using ultrashort pump pulses 47 1985
 
KANEKA CORPORATION (1)
6324195 Laser processing of a thin film 53 1999
 
GSI GROUP INC (1)
5854805 Laser machining of a workpiece 40 1997
 
PRESSTEK, LLC. (1)
* 5822345 Diode-pumped laser system and method 15 1996
 
TERADYNE LASER SYSTEMS, INC., A MASSACHUSETTS CORP. (1)
4483005 Affecting laser beam pulse width 39 1981
 
QUICK TECHNOLOGIES LTD. (1)
5329152 Ablative etch resistant coating for laser personalization of integrated circuits 45 1992
 
Gazelle Microcircuits, Inc. (1)
4872140 Laser programmable memory array 24 1987
 
EHRENWALD, JERRY (1)
4467172 Method and apparatus for laser engraving diamonds with permanent identification markings 65 1983
 
MITSUBISHI DENKI KABUSHIKI KAISHA (2)
* 2003/0146,196 LASER BEAM MACHINING METHOD FOR WIRING BOARD, LASER BEAM MACHINING APPARATUS FOR WIRING BOARD, AND CARBONIC ACID GAS LASER OSCILLATOR FOR MACHINING WIRING BOARD 7 1996
6875951 Laser machining device 55 2002
 
The United States of America as represented by the Secretary of the Navy (2)
5310989 Method for laser-assisted etching of III-V and II-VI semiconductor compounds using chlorofluorocarbon ambients 13 1992
5745284 Solid-state laser source of tunable narrow-bandwidth ultraviolet radiation 107 1996
 
Grumman Aerospace Corporation (1)
5005946 Multi-channel filter system 44 1989
 
Arnold; Karl H. (1)
5925271 Laser beam shaping device and process including a rotating mirror 89 1996
 
MARGER JOHNSON & MCCOLLOM, P.C. (1)
6211485 Blind via laser drilling system 76 1998
 
MAUSER-WERKE GMBH (1)
5201437 Widemouth steel drum of conical shape 19 1992
 
SRI INTERNATIONAL (1)
5451785 Upconverting and time-gated two-dimensional infrared transillumination imaging 57 1994
 
RESEARCH FOUNDATION OF CITY COLLEGE OF NEW YORK, THE (1)
4932031 Chromium-doped foresterite laser system 34 1989
 
JMAR, LLC, A DELAWARE LIMITED LIABILITY COMPANY (2)
6472295 Method and apparatus for laser ablation of a target material 90 1999
6717101 Method and apparatus for laser ablation of a target material 27 2002
 
JMAR TECHNOLOGY CO. (3)
5539764 Laser generated X-ray source 36 1995
5742634 Picosecond laser 55 1996
5940418 Solid-state laser system for ultra-violet micro-lithography 49 1996
 
DEUTSCHE FORSCHUNGSANSTALT FUER LUFT- UND RAUMFAHRT E.V. (2)
5361275 Apparatus for removing material from a target 24 1993
5725914 Process and apparatus for producing a functional structure of a semiconductor component 39 1995
 
VIA MECHANICS, LTD. (1)
6849824 Multibeam laser drilling apparatus 38 2003
 
TIME-BANDWITH PRODUCTS AG (1)
5987049 Mode locked solid-state laser pumped by a non-diffraction-limited pumping source and method for generating pulsed laser radiation by pumping with a non-diffraction-limited pumping beam 39 1998
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (1)
5513194 Stretched-pulse fiber laser 111 1995
 
SDL, INC. (1)
4794615 End and side pumped laser 51 1987
 
NEC CORPORATION (1)
5586138 Multiple-cavity semiconductor laser capable of generating ultrashort light pulse train with ultrahigh repetition rate 37 1995
 
AT&T LABS, INC. (2)
5021362 Laser link blowing in integrateed circuit fabrication 25 1989
5042040 Amplitude noise reduction for optically pumped modelocked lasers 19 1990
 
TPO HONG KONG HOLDING LIMITED (1)
6169014 Laser crystallization of thin films 97 1999
 
IMAR Technology Company (1)
5790574 Low cost, high average power, high brightness solid state laser 65 1997
 
NEOS TECHNOLOGIES, INC. (1)
5268911 X-cut crystal quartz acousto-optic modulator 24 1993
 
ENTRUST DATACARD CORPORATION (1)
6838639 Method for the machining of workpieces by means of several laser beams 20 2003
 
United Distillers PLC (1)
5653900 Dynamic laser marking 108 1993
 
IMRA AMERICA, INC. (7)
5400350 Method and apparatus for generating high energy ultrashort pulses 147 1994
5627848 Apparatus for producing femtosecond and picosecond pulses from modelocked fiber lasers cladding pumped with broad area diode laser arrays 136 1995
5880877 Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier 161 1997
5818630 Single-mode amplifiers and compressors based on multi-mode fibers 253 1997
6072811 Integrated passively modelocked fiber lasers and method for constructing the same 119 1998
6034975 High power, passively modelocked fiber laser, and method of construction 84 1998
2005/0041,702 High energy optical fiber amplifier for picosecond-nanosecond pulses for advanced material processing applications 129 2004
 
FUJITSU SEMICONDUCTOR LIMITED (1)
6297541 Semiconductor device and method for fabricating the same 29 1999
 
Microelectronics and Computer Technology Corporation (1)
5236551 Rework of polymeric dielectric electrical interconnect by laser photoablation 72 1992
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (4)
5689519 Environmentally stable passively modelocked fiber laser pulse source 93 1993
5656186 Method for controlling configuration of laser induced breakdown and ablation 335 1994
5923686 Environmentally stable passively modelocked fiber laser pulse source 69 1997
RE37585 Method for controlling configuration of laser induced breakdown and ablation 131 1999
 
GENERAL ELECTRIC COMPANY (2)
* 5730811 Cavity dumped laser shock peening process 31 1995
5953354 Laser resonator optical alignment 30 1998
 
XRL, INC. (1)
4532402 Method and apparatus for positioning a focused beam on an integrated circuit 118 1983
 
NOVELLUS SYSTEMS, INC. (1)
5669979 Photoreactive surface processing 143 1996
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
4914663 Generation of short high peak power pulses from an injection mode-locked Q-switched laser oscillator 32 1988
 
LUMENTUM OPERATIONS LLC (3)
5867305 Optical amplifier with high energy levels systems providing high peak powers 161 1996
6151338 High power laser optical amplifier system 93 1997
6335941 Semiconductor laser highpower amplifier system 33 2000
 
ANALOG DEVICES, INC. (1)
4399345 Laser trimming of circuit elements on semiconductive substrates 49 1981
 
HITACHI CONSTRUCTION MACHINERY CO., LTD. (1)
5662822 Dam bar cutting apparatus and dam bar cutting method 33 1996
 
UNIVERSITY OF MARYLAND, BALTIMORE (1)
5956354 Dual media laser with mode locking 35 1996
 
Calmar Optcom, Inc. (1)
6097741 Passively mode-locked fiber lasers 66 1998
 
EASTMAN KODAK COMPANY (1)
4878222 Diode laser with improved means for electrically modulating the emitted light beam intensity including turn-on and turn-off and electrically controlling the position of the emitted laser beam spot 17 1988
 
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC (4)
5720894 Ultrashort pulse high repetition rate laser system for biological tissue processing 213 1996
6621040 Ultrashort pulse laser machining of metals and alloys 71 1997
6150630 Laser machining of explosives 150 1998
6268586 Method and apparatus for improving the quality and efficiency of ultrashort-pulse laser machining 35 1999
 
Y-Beam Technologies, Inc. (1)
6156030 Method and apparatus for high precision variable rate material removal and modification 166 1998
 
SPECTRA-PHYSICS (DELAWARE), INC., A CORP. OF DE (CHANGED TO) (1)
5059764 Diode-pumped, solid state laser-based workstation for precision materials processing and machining 55 1988
 
LOS ALAMOS NATIONAL SECURITY, LLC (1)
5756924 Multiple laser pulse ignition method and apparatus 65 1996
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
6441337 Laser machining method, laser machining device and control method of laser machining 22 1999
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
DISCO CORPORATION (2)
* 8314014 Laser processing apparatus and laser processing method 0 2010
* 2010/0317,172 LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD 4 2010
 
V TECHNOLOGY CO., LTD. (1)
9054494 Pulsed laser oscillator and method for controlling pulsed laser oscillation 0 2014
 
APPLIED MATERIALS, INC. (1)
* 9498845 Pulse train annealing method and apparatus 0 2012
 
FEI COMPANY (2)
8853592 Method for laser machining a sample having a crystalline structure 0 2009
* 2011/0115,129 Method and Apparatus for Laser Machining 20 2009
 
NLIGHT PHOTONICS CORPORATION (2)
9478931 Method for actively controlling the optical output of a seed laser 0 2013
* 9263855 Injection locking of gain switched diodes for spectral narrowing and jitter stabilization 0 2013
 
PICODEON LTD OY (2)
* 8741749 Semiconductor and an arrangement and a method for producing a semiconductor 0 2007
* 2009/0166,812 SEMICONDUCTOR AND AN ARRANGEMENT AND A METHOD FOR PRODUCING A SEMICONDUCTOR 3 2007
* Cited By Examiner

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