Non-contact micro mirrors
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United States of America Patent
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Sep 8, 2009
Grant Date -
May 1, 2008
app pub date -
Oct 27, 2006
filing date -
Oct 27, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge is configured to produce an elastic restoring force on the mirror plate when the mirror plate is tilted away from an un-tilted position. The micro mirror device also includes a controller that can produce an electrostatic force to overcome the elastic restoring force to tilt the mirror plate from the un-tilted position to an “on” position or an “off” position. The electrostatic force can counter the elastic restoring force to hold the mirror plate at the “on” position or the “off” position.
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