Phase measurement system
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United States of America Patent
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Sep 8, 2009
Grant Date -
Dec 22, 2005
app pub date -
Jun 10, 2005
filing date -
Jun 17, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
. Here, the second pitch of the pattern light is determined by a value calculated based on the phase resolution of the pattern light having the first pitch. Then, using the reference image thus obtained, phase coupling for the measuring image is performed. The three-dimensional shape of the sample is obtained in this manner.
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