Magnetic thin film and method of forming the same, magnetic device and inductor, and method of manufacturing magnetic device
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United States of America Patent
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Sep 15, 2009
Grant Date -
Jun 1, 2006
app pub date -
Nov 28, 2005
filing date -
Nov 30, 2004
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Abstract
A magnetic thin film with a high resonant frequency and superior high-frequency characteristics, and a magnetic device and an inductor with superior high-frequency characteristics are provided. A planar coil and a magnetic thin film are disposed on a substrate, and an inductor is formed between connection terminals. An obliquely-grown magnetic layer in the magnetic thin film is crystal-grown in an oblique direction with respect to a surface of the substrate (an obliquely-grown magnetic body). In order to make the obliquely-grown magnetic body exhibit soft magnetism in the obliquely-grown magnetic layer, an insulator is mixed into the obliquely-grown magnetic body. The obliquely-grown magnetic layer shows in-plane magnetocrystalline anisotropy, and the in-plane magnetocrystalline anisotropy is increased, and an anisotropic magnetic field is increased. The anisotropic magnetic field can be changed only by a crystal growth direction of the obliquely-grown magnetic layer, so without reducing saturation magnetization, the anisotropic magnetic field can be increased, and the resonant frequency of the magnetic thin film can be improved.
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