Self referencing heterodyne reflectometer and method for implementing

United States of America Patent

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Sep 15, 2009
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May 17, 2007
app pub date
Sep 27, 2006
filing date
Sep 27, 2005

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, generated from the SR/AM beam, which are used for calculating film thickness.

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VERITY INSTRUMENTS INC	2901 EISENHOWER STREET CARROLLTON TX 75007

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G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

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Inventor Name	Address	# of filed Patents	Total Citations
Aiyer, Arun Ananth	Lewisville , US	13	157
Meloni, Mark A	Longmont , US	12	271

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Self referencing heterodyne reflectometer and method for implementing

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United States of America Patent

11528732

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PATENT NO	7589843
APP PUB NO	20070109551A1
SERIAL NO	11528732
DOCKET NO

US Family Size	Non-US Coverage
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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 15, 2009	US,7589843,B2 US7589843B2	GRANTED PATENT AS SECOND PUBLICATION
May 17, 2007	US,20070109551,A1 US20070109551A1	FIRST PUBLISHED PATENT APPLICATION

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11528732

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