Detachable electrostatic chuck having sealing assembly
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United States of America Patent
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Sep 15, 2009
Grant Date -
Apr 17, 2008
app pub date -
Oct 13, 2006
filing date -
Oct 13, 2006
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A detachable electrostatic chuck is capable of being attached to a pedestal in a process chamber. The chuck comprises an electrostatic puck having a ceramic body with an embedded electrode. The chuck also has a baseplate below the electrostatic puck with a lower surface which is bonded to a sealing assembly comprising a sealing plate and sealing ring. The sealing plate and ring are polished to form a gas-tight seal between the chuck and pedestal to prevent gas leakage from or into this region.
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