US Patent No: 7,592,817
Number of patents in Portfolio can not be more than 2000
Alignment correction system and method of use
Stats
-
Sep 22, 2009
Issued date -
Jul 17, 2007
filing date -
11/778,679
serial no -
In Force
status
Importance
Loading Importance Indicators...
Abstract
A system and method for correcting alignment of a product on a tool and, more particularly, to a system and method for correcting alignment of a wafer on a chuck of a tool. The system is a tool comprising at least one contact near a circumference of the tool and a grounded contact proximate to the at least one contact. The method comprises measuring current on each branch of a circuit and calculating an angle of a wafer based on a difference in the current on each branch of the circuit.
Loading the Abstract Image...
First Claim
Related Publications
Loading Related Publications...
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
|
|
|||
| 5,759,007 Notch finder and combination wafer transfer machine | 5 | 1996 | |
| 6,456,378 Semiconductor wafer alignment methods and semiconductor wafer alignment tools | 3 | 2001 | |
|
|
|||
| 4,457,664 Wafer alignment station | 75 | 1982 | |
|
|
|||
| 5,551,829 Notch finder having a flexible alignment rod | 9 | 1995 | |
|
|
|||
| 7,123,362 Method for aligning wafer | 1 | 2004 | |
|
|
|||
| 7,388,385 Wafer dicing system | 1 | 2005 | |
|
|
|||
| 6,324,298 Automated wafer defect inspection system and a process of performing such inspection | 118 | 1999 | |
|
|
|||
| 7,494,830 Method and device for wafer backside alignment overlay accuracy | 2 | 2007 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Mar 22, 2013 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 22, 2017 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 22, 2021 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |