Field effect transistor with amorphous oxide active layer containing microcrystals and gate electrode opposed to active layer through gate insulator

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United States of America Patent

PATENT NO 7601984
SERIAL NO

11269600

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Abstract

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A novel amorphous oxide applicable, for example, to an active layer of a TFT is provided. The amorphous oxide comprises microcrystals.

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Patent Owner(s)

  • JAPAN SCIENCE AND TECHNOLOGY AGENCY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hosono, Hideo Yokohama , JP 109 57369
Kamiya, Toshio Yokohama , JP 36 49386
Nakagawa, Katsumi Zama , JP 165 12503
Nomura, Kenji Yokohama , JP 101 46051
Sano, Masafumi Fujisawa , JP 125 20782

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