Probe card, apparatus and method for inspecting an object
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United States of America Patent
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-
Oct 20, 2009
Grant Date -
Mar 1, 2007
app pub date -
Aug 28, 2006
filing date -
Aug 30, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe card, an apparatus and a method of inspecting an object. In the example method, a first inspection current may be divided into a plurality of first divided inspection currents. Each of the first divided inspection currents may be supplied to a different one of a plurality of first chips. A second inspection current may be selectively applied to a second chip other than the first plurality of chips. In an example, the second inspection current may be substantially equal to at least one of the plurality of first divided inspection currents. In a further example, the example probe card and/or the apparatus may perform the example method.
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