Signal-carrying flexure structure for micro-electromechanical devices
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United States of America Patent
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Nov 3, 2009
Grant Date -
Mar 1, 2007
app pub date -
Aug 31, 2005
filing date -
Aug 31, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A signal-carrying flexure structure for a MEM device comprises at least two conductive flexure segments having respective cross-sectional areas, and at least one crosspiece affixed to the flexure segments to operatively couple the segments together such that the flexure segments and crosspiece form a single flexure structure. The resulting flexure structure's spring constant is less than that of a solid flexure having a comparable total cross-sectional area, while its resistance is approximately equal to that of the solid flexure.
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