MEMS control system gain normalization
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United States of America Patent
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Nov 3, 2009
Grant Date -
Nov 22, 2007
app pub date -
May 19, 2006
filing date -
May 19, 2006
priority date (Note) -
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Abstract
A method and system for providing gain normalization in a MEMS control system and/or device includes moving a MEMS structure from a first position wherein light is redirected from a first input port to an output port to a second position wherein light is redirected from a second input port to the output port, dithering an orientation of the MEMS structure, monitoring an intensity of the dithered light and providing a feedback signal in dependence upon the monitored intensity, and using the feedback signal, determining a control loop gain for active alignment of the MEMS structure. Gain normalization is achieved by applying a fitting function, which is split into a gain control loop gain part and a mechanical part.
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