Microelectromechanical device with optical function separated from mechanical and electrical function
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United States of America Patent
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Nov 3, 2009
Grant Date -
Jan 17, 2008
app pub date -
Jul 2, 2007
filing date -
Sep 27, 2004
priority date (Note) -
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Abstract
A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.
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