Film bulk acoustic resonator package and method of fabricating same
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United States of America Patent
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Nov 10, 2009
Grant Date -
Jan 19, 2006
app pub date -
Jul 13, 2004
filing date -
Jul 13, 2004
priority date (Note) -
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Abstract
A microfabricated device has a first substrate, a second substrate, a film bulk acoustic resonator (FBAR) device, and a circuit. The second substrate is bonded to the first substrate to define a chamber. The FBAR device is located on a surface of the first substrate and inside the chamber. The circuit is located on a surface of the second substrate and inside the chamber. An electrical connection connects the circuit and the FBAR device.
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