Edge flaw detection device
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United States of America Patent
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Nov 10, 2009
Grant Date -
Apr 9, 2009
app pub date -
Aug 10, 2005
filing date -
Aug 10, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
An edge flaw detection device includes an elliptical mirror having a mirror surface on the inside thereof and having a cutout that allows an object to be inserted therethrough formed at the apex thereof, a light-emitting unit that radiates coherent light toward an edge of the object arranged in the vicinity of a first focal position of the elliptical mirror, a photo detector that is arranged in a second focal position of the elliptical mirror, and a light-shielding member that shields low-order diffracted light that is reflected regularly. The light-emitting unit is moved in the thickness direction of the object by a moving member so that the light-emitting unit can radiate the coherent light in a different radiation range in the thickness direction at the edge of the object.
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