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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CALIFORNIA INSTITUTE OF TECHNOLOGY	1200 E CALIFORNIA BLVD M/C 6-32 PASADENA CA 91125 91125

International Classification(s)

• G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Li, Mo	Pasadena , US	50	318
Roukes, Michael L	Pasadena , US	59	1389
Tang, Hongxing	Pasadena , US	19	525

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
November 17, 2009	US,7617736,B2   US7617736B2	GRANTED PATENT AS SECOND PUBLICATION
February 12, 2009	US,20090038404,A1   US20090038404A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7617736

Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes

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