
US Patent No: 7,619,419
Number of patents in Portfolio can not be more than 2000
Wideband active-passive differential signal probe
Stats
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Nov 17, 2009
Issued date -
Apr 28, 2006
filing date -
11/413,738
serial no -
In Force
status
Importance
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Abstract
A wideband differential signal probe includes separate paths to convert a lower frequency component and a higher frequency component of a differential signal to a lower frequency single ended signal and a higher frequency single ended signal which are combined for the probe's output which is commonly input to instrumentation.
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First Claim
Related Publications
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International Classification(s)
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- [Patents Count]
Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 5,476,211 Method of manufacturing electrical contacts, using a sacrificial member | 353 | 1993 | |
| 5,917,707 Flexible contact structure with an electrically conductive shell | 288 | 1994 | |
| 6,049,976 Method of mounting free-standing resilient electrical contact structures to electronic components | 119 | 1995 | |
| 5,772,451 Sockets for electronic components and methods of connecting to electronic components | 342 | 1995 | |
| 5,974,662 Method of planarizing tips of probe elements of a probe card assembly | 340 | 1995 | |
| 5,829,128 Method of mounting resilient contact structures to semiconductor devices | 213 | 1995 | |
| 5,852,871 Method of making raised contacts on electronic components | 127 | 1995 | |
| 5,601,740 Method and apparatus for wirebonding, for severing bond wires, and for forming balls on the ends of bond wires | 111 | 1995 | |
| 5,820,014 Solder preforms | 113 | 1996 | |
| 5,773,780 Method of severing bond wires and forming balls at their ends | 75 | 1996 | |
| 5,900,738 Contact structure device for interconnections, interposer, semiconductor assembly and package using the same and method | 145 | 1996 | |
| 5,926,951 Method of stacking electronic components | 154 | 1996 | |
| 6,184,587 Resilient contact structures, electronic interconnection component, and method of mounting resilient contact structures to electronic components | 111 | 1996 | |
| 6,242,803 Semiconductor devices with integral contact structures | 87 | 1996 | |
| 6,274,823 Interconnection substrates with resilient contact structures on both sides | 110 | 1996 | |
| 6,476,333 Raised contact structures (solder columns) | 70 | 1996 | |
| 6,064,213 Wafer-level burn-in and test | 251 | 1997 | |
| 5,806,181 Contact carriers (tiles) for populating larger substrates with spring contacts | 253 | 1997 | |
| 5,994,152 Fabricating interconnects and tips using sacrificial substrates | 172 | 1997 | |
| 6,442,831 Method for shaping spring elements | 72 | 1997 | |
| 6,482,013 Microelectronic spring contact element and electronic component having a plurality of spring contact elements | 137 | 1997 | |
| 5,832,601 Method of making temporary connections between electronic components | 187 | 1997 | |
| 5,864,946 Method of making contact tip structures | 157 | 1997 | |
| 5,878,486 Method of burning-in semiconductor devices | 107 | 1997 | |
| 5,884,398 Mounting spring elements on semiconductor devices | 103 | 1997 | |
| 5,983,493 Method of temporarily, then permanently, connecting to a semiconductor device | 117 | 1997 | |
| 5,998,228 Method of testing semiconductor | 126 | 1997 | |
| 6,032,356 Wafer-level test and burn-in, and semiconductor process | 158 | 1997 | |
| 6,184,053 Method of making microelectronic spring contact elements | 192 | 1997 | |
| 5,912,046 Method and apparatus for applying a layer of flowable coating material to a surface of an electronic component | 76 | 1997 | |
| 5,998,864 Stacking semiconductor devices, particularly memory chips | 176 | 1997 | |
| 6,050,829 Making discrete power connections to a space transformer of a probe card assembly | 154 | 1997 | |
| 6,307,161 Partially-overcoated elongate contact structures | 69 | 1997 | |
| 6,043,563 Electronic components with terminals and spring contact elements extending from areas which are remote from the terminals | 157 | 1997 | |
| 6,741,085 Contact carriers (tiles) for populating larger substrates with spring contacts | 88 | 1997 | |
| 6,520,778 Microelectronic contact structures, and methods of making same | 144 | 1998 | |
| 6,720,501 PC board having clustered blind vias | 68 | 1998 | |
| 6,042,712 Apparatus for controlling plating over a face of a substrate | 110 | 1998 | |
| 6,090,261 Method and apparatus for controlling plating over a face of a substrate | 81 | 1998 | |
| 6,110,823 Method of modifying the thickness of a plating on a member by creating a temperature gradient on the member, applications for employing such a method, and structures resulting from such a method | 172 | 1998 | |
| 6,023,103 Chip-scale carrier for semiconductor devices including mounted spring contacts | 148 | 1998 | |
| 6,033,935 Sockets for "springed" semiconductor devices | 108 | 1998 | |
| 6,669,489 Interposer, socket and assembly for socketing an electronic component and method of making and using same | 106 | 1998 | |
| 6,330,164 Interconnect assemblies and methods including ancillary electronic component connected in immediate proximity of semiconductor device | 120 | 1998 | |
| 6,029,344 Composite interconnection element for microelectronic components, and method of making same | 202 | 1998 | |
| 6,246,247 Probe card assembly and kit, and methods of using same | 112 | 1998 | |
| 6,441,315 Contact structures with blades having a wiping motion | 104 | 1998 | |
| 6,690,185 Large contactor with multiple, aligned contactor units | 113 | 1998 | |
| 6,255,126 Lithographic contact elements | 173 | 1998 | |
| 6,268,015 Method of making and using lithographic contact springs | 115 | 1998 | |
| 6,150,186 Method of making a product with improved material properties by moderate heat-treatment of a metal incorporating a dilute additive | 94 | 1998 | |
| 6,429,029 Concurrent design and subsequent partitioning of product and test die | 126 | 1998 | |
| 6,456,099 Special contact points for accessing internal circuitry of an integrated circuit | 102 | 1998 | |
| 6,215,670 Method for manufacturing raised electrical contact pattern of controlled geometry | 85 | 1999 | |
| 6,208,225 Filter structures for integrated circuit interfaces | 135 | 1999 | |
| 6,218,910 High bandwidth passive integrated circuit tester probe card assembly | 131 | 1999 | |
| 6,448,865 Integrated circuit interconnect system | 72 | 1999 | |
| 6,452,411 Efficient parallel testing of integrated circuit devices using a known good device to generate expected responses | 101 | 1999 | |
| 6,480,978 Parallel testing of integrated circuit devices using cross-DUT and within-DUT comparisons | 79 | 1999 | |
| 6,499,121 Distributed interface for parallel testing of multiple devices using a single tester channel | 92 | 1999 | |
| 6,627,483 Method for mounting an electronic component | 80 | 1999 | |
| 6,644,982 Method and apparatus for the transport and tracking of an electronic component | 100 | 1999 | |
| 6,887,723 Method for processing an integrated circuit including placing dice into a carrier and testing | 72 | 1999 | |
| 6,468,098 Electrical contactor especially wafer level contactor using fluid pressure | 90 | 1999 | |
| 6,655,023 Method and apparatus for burning-in semiconductor devices in wafer form | 81 | 1999 | |
| 6,827,584 Interconnect for microelectronic structures with enhanced spring characteristics | 90 | 1999 | |
| 6,491,968 Methods for making spring interconnect structures | 95 | 1999 | |
| 6,672,875 Spring interconnect structures | 96 | 1999 | |
| 6,339,338 Apparatus for reducing power supply noise in an integrated circuit | 88 | 2000 | |
| 6,168,974 Process of mounting spring contacts to semiconductor devices | 104 | 2000 | |
| 6,459,343 Integrated circuit interconnect system forming a multi-pole filter | 68 | 2000 | |
| 6,232,149 Sockets for "springed" semiconductor devices | 77 | 2000 | |
| 6,509,751 Planarizer for a semiconductor contactor | 122 | 2000 | |
| 6,215,196 Electronic component with terminals and spring contact elements extending from areas which are remote from the terminals | 70 | 2000 | |
| 6,640,432 Method of fabricating shaped springs | 100 | 2000 | |
| 6,677,744 System for measuring signal path resistance for an integrated circuit tester interconnect structure | 69 | 2000 | |
| 6,476,630 Method for testing signal paths between an integrated circuit wafer and a wafer tester | 73 | 2000 | |
| 6,525,555 Wafer-level burn-in and test | 96 | 2000 | |
| 6,727,579 ELECTRICAL CONTACT STRUCTURES FORMED BY CONFIGURING A FLEXIBLE WIRE TO HAVE A SPRINGABLE SHAPE AND OVERCOATING THE WIRE WITH AT LEAST ONE LAYER OF A RESILIENT CONDUCTIVE MATERIAL, METHODS OF MOUNTING THE CONTACT STRUCTURES TO ELECTRONIC COMPONENTS, AND APPLICATIONS FOR EMPLOYING THE CONTACT STRUCTURES | 90 | 2000 | |
| 6,685,817 Method and apparatus for controlling plating over a face of a substrate | 62 | 2000 | |
| 6,622,103 System for calibrating timing of an integrated circuit wafer tester | 90 | 2000 | |
| 6,603,323 Closed-grid bus architecture for wafer interconnect structure | 86 | 2000 | |
| 6,727,580 Microelectronic spring contact elements | 75 | 2000 | |
| 6,539,531 Method of designing, fabricating, testing and interconnecting an IC to external circuit nodes | 106 | 2000 | |
| 6,835,898 ELECTRICAL CONTACT STRUCTURES FORMED BY CONFIGURING A FLEXIBLE WIRE TO HAVE A SPRINGABLE SHAPE AND OVERCOATING THE WIRE WITH AT LEAST ONE LAYER OF A RESILIENT CONDUCTIVE MATERIAL, METHODS OF MOUNTING THE CONTACT STRUCTURES TO ELECTRONIC COMPONENTS, AND APPLICATIONS FOR EMPLOYING THE CONTACT STRUCTURES | 75 | 2000 | |
| 6,778,406 Resilient contact structures for interconnecting electronic devices | 96 | 2000 | |
| 6,475,822 Method of making microelectronic contact structures | 87 | 2000 | |
| 6,597,187 Special contact points for accessing internal circuitry of an integrated circuit | 73 | 2000 | |
| 6,603,324 Special contact points for accessing internal circuitry of an integrated circuit | 70 | 2000 | |
| 6,606,575 Cross-correlation timing calibration for wafer-level IC tester interconnect systems | 81 | 2000 | |
| 6,621,260 Special contact points for accessing internal circuitry of an integrated circuit | 75 | 2000 | |
| 6,701,612 Method and apparatus for shaping spring elements | 83 | 2000 | |
| 6,713,374 Interconnect assemblies and methods | 94 | 2000 | |
| 6,836,962 Method and apparatus for shaping spring elements | 70 | 2000 | |
| 6,538,538 High frequency printed circuit board via | 79 | 2001 | |
| 6,791,176 Lithographic contact elements | 77 | 2001 | |
| 6,616,966 Method of making lithographic contact springs | 121 | 2001 | |
| 6,780,001 Forming tool for forming a contoured microelectronic spring mold | 70 | 2001 | |
| 6,501,343 Integrated circuit tester with high bandwidth probe assembly | 88 | 2001 | |
| 6,606,014 Filter structures for integrated circuit interfaces | 61 | 2001 | |
| 6,534,856 Sockets for "springed" semiconductor devices | 86 | 2001 | |
| 6,910,268 Method for fabricating an IC interconnect system including an in-street integrated circuit wafer via | 104 | 2001 | |
| 6,856,150 Probe card with coplanar daughter card | 82 | 2001 | |
| 6,627,980 Stacked semiconductor device assembly with microelectronic spring contacts | 76 | 2001 | |
| 6,538,214 Method for manufacturing raised electrical contact pattern of controlled geometry | 74 | 2001 | |
| 6,882,239 Electromagnetically coupled interconnect system | 78 | 2001 | |
| 6,888,362 Test head assembly for electronic components with plurality of contoured microelectronic spring contacts | 86 | 2001 | |
| 6,729,019 Method of manufacturing a probe card | 94 | 2001 | |
| 6,678,876 Process and apparatus for finding paths through a routing space | 89 | 2001 | |
| 6,862,727 Process and apparatus for adjusting traces | 64 | 2001 | |
| 6,764,869 Method of assembling and testing an electronics module | 69 | 2001 | |
| 6,714,828 Method and system for designing a probe card | 72 | 2001 | |
| 6,882,546 Multiple die interconnect system | 71 | 2001 | |
| 6,664,628 Electronic component overlapping dice of unsingulated semiconductor wafer | 68 | 2001 | |
| 6,456,103 Apparatus for reducing power supply noise in an integrated circuit | 83 | 2001 | |
| 6,759,311 Fan out of interconnect elements attached to semiconductor wafer | 68 | 2001 | |
| 6,817,052 Apparatuses and methods for cleaning test probes | 76 | 2001 | |
| 6,816,031 Adjustable delay transmission line | 68 | 2001 | |
| 6,624,648 Probe card assembly | 100 | 2001 | |
| 6,777,319 Microelectronic spring contact repair | 73 | 2001 | |
| 6,479,308 Semiconductor fuse covering | 68 | 2001 | |
| 6,615,485 Probe card assembly and kit, and methods of making same | 83 | 2001 | |
| 6,891,385 Probe card cooling assembly with direct cooling of active electronic components | 77 | 2001 | |
| 7,002,363 Method and system for compensating thermally induced motion of probe cards | 115 | 2001 | |
| 6,741,092 Method and system for detecting an arc condition | 61 | 2001 | |
| 6,864,105 Method of manufacturing a probe card | 66 | 2002 | |
| 6,680,659 Integrated circuit interconnect system | 67 | 2002 | |
| 6,784,674 Test signal distribution system for IC tester | 74 | 2002 | |
| 6,798,225 Tester channel to multiple IC terminals | 76 | 2002 | |
| 6,825,422 Interconnection element with contact blade | 71 | 2002 | |
| 6,812,691 Compensation for test signal degradation due to DUT fault | 68 | 2002 | |
| 6,640,415 Segmented contactor | 100 | 2002 | |
| 6,657,455 Predictive, adaptive power supply for an integrated circuit under test | 78 | 2002 | |
| 6,807,734 Microelectronic contact structures, and methods of making same | 76 | 2002 | |
| 6,559,671 Efficient parallel testing of semiconductor devices using a known good device to generate expected responses | 72 | 2002 | |
| 6,646,520 Integrated circuit interconnect system | 69 | 2002 | |
| 6,839,964 Method for manufacturing a multi-layer printed circuit board | 64 | 2002 | |
| 6,686,754 Integrated circuit tester with high bandwidth probe assembly | 70 | 2002 | |
| 6,678,850 Distributed interface for parallel testing of multiple devices using a single tester channel | 72 | 2002 | |
| 6,818,840 Method for manufacturing raised electrical contact pattern of controlled geometry | 65 | 2002 | |
| 6,642,625 Sockets for "springed" semiconductor devices | 64 | 2002 | |
| 6,661,316 High frequency printed circuit board via | 67 | 2002 | |
| 6,825,052 Test assembly including a test die for testing a semiconductor product die | 79 | 2002 | |
| 6,788,094 Wafer-level burn-in and test | 74 | 2002 | |
| 6,845,491 Method of designing, fabricating, testing and interconnecting an IC to external circuit nodes | 68 | 2003 | |
| 6,784,677 Closed-grid bus architecture for wafer interconnect structure | 64 | 2003 | |
| 7,342,402 Method of probing a device using captured image of probe structure in which probe tips comprise alignment features | 25 | 2003 | |
| 6,911,835 High performance probe system | 79 | 2003 | |
| 6,838,893 Probe card assembly | 66 | 2003 | |
| 6,870,381 Insulative covering of probe tips | 62 | 2003 | |
| 6,911,814 Apparatus and method for electromechanical testing and validation of probe cards | 69 | 2003 | |
| 6,913,468 Methods of removably mounting electronic components to a circuit board, and sockets formed by the methods | 81 | 2003 | |
| 6,949,942 Predictive, adaptive power supply for an integrated circuit under test | 44 | 2003 | |
| 6,822,529 Integrated circuit interconnect system | 66 | 2003 | |
| 6,917,210 Integrated circuit tester with high bandwidth probe assembly | 65 | 2003 | |
| 7,276,922 Closed-grid bus architecture for wafer interconnect structure | 23 | 2004 | |
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| 4,520,314 Probe head arrangement for conductor line testing with at least one probe head comprising a plurality of resilient contacts | 38 | 1982 | |
| 4,744,041 Method for testing DC motors | 115 | 1985 | |
| 4,851,767 Detachable high-speed opto-electronic sampling probe | 30 | 1988 | |
| 4,831,494 Multilayer capacitor | 151 | 1988 | |
| 4,922,128 Boost clock circuit for driving redundant wordlines and sample wordlines | 78 | 1989 | |
| 4,987,100 Flexible carrier for an electronic device | 80 | 1989 | |
| 5,001,423 Dry interface thermal chuck temperature control system for semiconductor wafer testing | 130 | 1990 | |
| 5,007,163 Non-destructure method of performing electrical burn-in testing of semiconductor chips | 65 | 1990 | |
| 5,207,585 Thin interface pellicle for dense arrays of electrical interconnects | 159 | 1990 | |
| 5,061,192 High density connector | 139 | 1990 | |
| 5,334,931 Molded test probe assembly | 92 | 1991 | |
| 5,371,654 Three dimensional high performance interconnection package | 214 | 1992 | |
| 5,441,690 Process of making pinless connector | 72 | 1993 | |
| 5,537,372 High density data storage system with topographic contact sensor | 110 | 1993 | |
| 5,531,022 Method of forming a three dimensional high performance interconnection package | 146 | 1994 | |
| 5,532,608 Ceramic probe card and method for reducing leakage current | 60 | 1995 | |
| 5,804,982 Miniature probe positioning actuator | 103 | 1995 | |
| 5,810,607 Interconnector with contact pads having enhanced durability | 157 | 1995 | |
| 5,726,211 Process for making a foamed elastometric polymer | 101 | 1996 | |
| 5,756,021 Electronic devices comprising dielectric foamed polymers | 87 | 1996 | |
| 5,700,844 Process for making a foamed polymer | 128 | 1996 | |
| 5,785,538 High density test probe with rigid surface structure | 85 | 1996 | |
| 6,268,016 Manufacturing computer systems with fine line circuitized substrates | 63 | 1996 | |
| 5,723,347 Semi-conductor chip test probe and process for manufacturing the probe | 105 | 1996 | |
| 6,286,208 Interconnector with contact pads having enhanced durability | 78 | 1996 | |
| 5,838,160 Integral rigid chip test probe | 81 | 1996 | |
| 6,054,651 Foamed elastomers for wafer probing applications and interposer connectors | 78 | 1996 | |
| 5,926,029 Ultra fine probe contacts | 104 | 1997 | |
| 6,059,982 Micro probe assembly and method of fabrication | 146 | 1997 | |
| 5,804,607 Process for making a foamed elastomeric polymer | 116 | 1997 | |
| 6,062,879 High density test probe with rigid surface structure | 78 | 1998 | |
| 6,104,201 Method and apparatus for passive characterization of semiconductor substrates subjected to high energy (MEV) ion implementation using high-injection surface photovoltage | 69 | 1998 | |
| 6,332,270 Method of making high density integral test probe | 78 | 1998 | |
| 6,206,273 Structures and processes to create a desired probetip contact geometry on a wafer test probe | 70 | 1999 | |
| 6,452,406 Probe structure having a plurality of discrete insulated probe tips | 76 | 1999 | |
| 6,528,984 Integrated compliant probe for wafer level test and burn-in | 102 | 1999 | |
| 6,526,655 Angled flying lead wire bonding process | 63 | 2001 | |
| 6,788,093 Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies | 101 | 2002 | |
| 6,943,571 Reduction of positional errors in a four point probe resistance measurement | 59 | 2003 | |
| 7,007,380 TFI probe I/O wrap test method | 91 | 2004 | |
| 7,011,531 Membrane probe with anchored elements | 91 | 2005 | |
| 7,005,879 Device for probe card power bus noise reduction | 91 | 2005 | |
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| 4,280,112 Electrical coupler | 97 | 1979 | |
| 4,697,143 Wafer probe | 195 | 1984 | |
| 4,764,723 Wafer probe | 90 | 1986 | |
| 4,827,211 Wafer probe | 124 | 1987 | |
| 4,858,160 System for setting reference reactance for vector corrected measurements | 99 | 1988 | |
| 4,849,689 Microwave wafer probe having replaceable probe tip | 124 | 1988 | |
| 5,012,186 Electrical probe with contact force protection | 40 | 1990 | |
| 5,045,781 High-frequency active probe having replaceable contact needles | 108 | 1991 | |
| 5,101,453 Fiber optic wafer probe | 97 | 1991 | |
| 5,266,889 Wafer probe station with integrated environment control enclosure | 132 | 1992 | |
| 5,457,398 Wafer probe station having full guarding | 121 | 1993 | |
| 5,506,515 High-frequency probe tip assembly | 148 | 1994 | |
| 5,610,529 Probe station having conductive coating added to thermal chuck insulator | 134 | 1995 | |
| 5,565,788 Coaxial wafer probe with tip shielding | 143 | 1995 | |
| 5,729,150 Low-current probe card with reduced triboelectric current generating cables | 135 | 1995 | |
| 5,914,613 Membrane probing system with local contact scrub | 104 | 1996 | |
| 6,232,788 Wafer probe station for low-current measurements | 86 | 1997 | |
| 6,232,789 Probe holder for low current measurements | 87 | 1997 | |
| 6,034,533 Low-current pogo probe card | 105 | 1997 | |
| 6,137,302 Low-current probe card with reduced triboelectric current generating cables | 106 | 1997 | |
| 6,256,882 Membrane probing system | 66 | 1998 | |
| 6,578,264 Method for constructing a membrane probe using a depression | 76 | 2000 | |
| 6,384,615 Probe holder for low current measurements | 41 | 2001 | |
| 6,549,106 Waveguide with adjustable backshort | 108 | 2001 | |
| 7,233,160 Wafer probe | 20 | 2001 | |
| 6,496,024 Probe holder for testing of a test device | 38 | 2002 | |
| 6,850,082 Probe holder for testing of a test device | 37 | 2002 | |
| 6,724,205 Probe for combined signals | 96 | 2002 | |
| 6,815,963 Probe for testing a device under test | 63 | 2003 | |
| 6,806,724 Probe for combined signals | 93 | 2003 | |
| 7,161,363 Probe for testing a device under test | 33 | 2004 | |
| 6,930,498 Membrane probing system | 54 | 2004 | |
| 7,009,383 Wafer probe station having environment control enclosure | 91 | 2004 | |
| 7,187,188 Chuck with integrated wafer support | 74 | 2004 | |
| 2006/0184,041 System for testing semiconductors | 32 | 2006 | |
| 7,332,923 Test probe for high-frequency measurement | 21 | 2006 | |
| 7,271,603 Shielded probe for testing a device under test | 32 | 2006 | |
| 7,403,028 Test structure and probe for differential signals | 19 | 2007 | |
| 2008/0111,571 Membrane probing system | 10 | 2008 | |
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| 4,980,637 Force delivery system for improved precision membrane probe | 94 | 1988 | |
| 4,918,383 Membrane probe with automatic contact scrub action | 151 | 1988 | |
| 4,906,920 Self-leveling membrane probe | 201 | 1988 | |
| 5,172,051 Wide bandwidth passive probe | 103 | 1991 | |
| 5,298,972 Method and apparatus for measuring polarization sensitivity of optical devices | 106 | 1991 | |
| 5,274,336 Capacitively-coupled test probe | 129 | 1992 | |
| 5,308,250 Pressure contact for connecting a coaxial shield to a microstrip ground plane | 27 | 1992 | |
| 5,463,324 Probe with contacts that interdigitate with and wedge between adjacent legs of an IC or the like | 48 | 1993 | |
| 5,493,070 Measuring cable and measuring system | 90 | 1994 | |
| 5,507,652 Wedge connector for integrated circuits | 39 | 1995 | |
| 5,578,932 Method and apparatus for providing and calibrating a multiport network analyzer | 141 | 1995 | |
| 5,945,836 Loaded-board, guided-probe test fixture | 118 | 1996 | |
| 5,923,180 Compliant wafer prober docking adapter | 70 | 1997 | |
| 5,940,965 Method of making multiple lead voltage probe | 30 | 1997 | |
| 5,903,143 Probe apparatus with RC circuit connected between ground and a guard | 92 | 1997 | |
| 6,060,888 Error correction method for reflection measurements of reciprocal devices in vector network analyzers | 111 | 1998 | |
| 6,251,595 Methods and devices for carrying out chemical reactions | 90 | 1998 | |
| 6,175,228 Electronic probe for measuring high impedance tri-state logic circuits | 82 | 1998 | |
| 6,300,775 Scattering parameter calibration system and method | 126 | 1999 | |
| 6,271,673 Probe for measuring signals | 101 | 1999 | |
| 6,407,562 Probe tip terminating device providing an easily changeable feed-through termination | 85 | 1999 | |
| 2001/0024,116 Electronic probe for measuring high impedance tri-state logic circuits | 77 | 2001 | |
| 6,643,597 Calibrating a test system using unknown standards | 114 | 2001 | |
| 6,717,426 Blade-like connecting needle | 77 | 2002 | |
| 6,768,328 Single point probe structure and method | 73 | 2002 | |
| 6,864,694 Voltage probe | 89 | 2002 | |
| 2004/0095,145 Method and apparatus for performing multiport through-reflect-line calibration and measurement | 94 | 2002 | |
| 2004/0140,819 Differential voltage probe | 28 | 2003 | |
| 2004/0199,350 System and method for determining measurement errors of a testing device | 92 | 2003 | |
| 2005/0030,047 Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration | 81 | 2003 | |
| 7,025,628 Electronic probe extender | 95 | 2003 | |
| 2004/0162,689 Multiport network analyzer calibration employing reciprocity of a device | 91 | 2004 | |
| 6,933,713 High bandwidth oscilloscope probe with replaceable cable | 54 | 2004 | |
| 7,005,868 Apparatus and method for canceling DC errors and noise generated by ground shield current in a probe | 91 | 2004 | |
| 7,030,328 Liquid metal switch employing micro-electromechanical system (MEMS) structures for actuation | 12 | 2004 | |
| 7,026,834 Multiple two axis floating probe block assembly using split probe block | 91 | 2005 | |
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| 4,998,062 Probe device having micro-strip line structure | 88 | 1989 | |
| 5,084,671 Electric probing-test machine having a cooling system | 172 | 1990 | |
| 5,091,692 Probing test device | 112 | 1990 | |
| 5,198,752 Electric probing-test machine having a cooling system | 151 | 1991 | |
| 5,315,237 Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit | 106 | 1991 | |
| 5,321,352 Probe apparatus and method of alignment for the same | 130 | 1992 | |
| 5,321,453 Probe apparatus for probing an object held above the probe card | 100 | 1992 | |
| 5,635,846 Test probe having elongated conductor embedded in an elostomeric material which is mounted on a space transformer | 129 | 1993 | |
| 5,404,111 Probe apparatus with a swinging holder for an object of examination | 111 | 1993 | |
| 5,517,126 Probe apparatus | 127 | 1993 | |
| 5,521,522 Probe apparatus for testing multiple integrated circuit dies | 141 | 1993 | |
| 5,539,676 Method of identifying probe position and probing method in prober | 92 | 1994 | |
| 5,811,982 High density cantilevered probe for electronic devices | 112 | 1996 | |
| 5,777,485 Probe method and apparatus with improved probe contact | 117 | 1996 | |
| 5,910,727 Electrical inspecting apparatus with ventilation system | 88 | 1996 | |
| 5,821,763 Test probe for high density integrated circuits, methods of fabrication thereof and methods of use thereof | 162 | 1996 | |
| 5,804,983 Probe apparatus with tilt correction mechanisms | 147 | 1997 | |
| 6,334,247 High density integrated circuit apparatus, test probe and methods of use thereof | 83 | 1997 | |
| 5,914,614 High density cantilevered probe for electronic devices | 94 | 1997 | |
| 5,999,268 Apparatus for aligning a semiconductor wafer with an inspection contactor | 105 | 1997 | |
| 6,060,892 Probe card attaching mechanism | 92 | 1997 | |
| 6,300,780 High density integrated circuit apparatus, test probe and methods of use thereof | 74 | 1998 | |
| 6,124,725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer | 127 | 1998 | |
| 6,329,827 High density cantilevered probe for electronic devices | 72 | 1998 | |
| 6,414,478 Transfer mechanism for use in exchange of probe card | 78 | 2000 | |
| 6,722,032 Method of forming a structure for electronic devices contact locations | 61 | 2001 | |
| 7,005,842 Probe cartridge assembly and multi-probe assembly | 91 | 2001 | |
| 6,927,587 Probe apparatus | 62 | 2003 | |
| 6,906,542 Probing method and prober | 59 | 2003 | |
| 6,794,888 Probe device | 74 | 2003 | |
| 7,026,832 Probe mark reading device and probe mark reading method | 92 | 2003 | |
| 7,009,415 Probing method and probing apparatus | 93 | 2004 | |
| 7,023,226 Probe pins zero-point detecting method, and prober | 91 | 2004 | |
| 7,332,918 Prober and probe testing method for temperature-controlling object to be tested | 22 | 2005 | |
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| 4,888,550 Intelligent multiprobe tip | 91 | 1983 | |
| 5,128,612 Disposable high performance test head | 26 | 1990 | |
| 5,159,752 Scanning electron microscope based parametric testing method and apparatus | 117 | 1990 | |
| 5,225,037 Method for fabrication of probe card for testing of semiconductor devices | 212 | 1991 | |
| 5,317,656 Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry | 70 | 1993 | |
| 5,511,010 Method and apparatus of eliminating interference in an undersettled electrical signal | 88 | 1994 | |
| 6,292,760 Method and apparatus to measure non-coherent signals | 91 | 1998 | |
| 6,906,539 High density, area array probe card apparatus | 54 | 2001 | |
| 6,911,834 Multiple contact vertical probe solution enabling Kelvin connection benefits for conductive bump probing | 54 | 2002 | |
| 6,741,129 Differential amplifier slew rate boosting scheme | 34 | 2002 | |
| 7,026,833 Multiple-chip probe and universal tester contact assemblage | 93 | 2005 | |
| 7,327,153 Analog built-in self-test module | 25 | 2005 | |
| 7,323,899 System and method for resumed probing of a wafer | 19 | 2006 | |
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| 4,312,117 Integrated test and assembly device | 151 | 1979 | |
| 4,970,386 Vertical FET high speed optical sensor | 43 | 1989 | |
| 5,487,999 Method for fabricating a penetration limited contact having a rough textured surface | 159 | 1994 | |
| 5,686,317 Method for forming an interconnect having a penetration limited contact structure for establishing a temporary electrical connection with a semiconductor die | 235 | 1995 | |
| 5,869,974 Micromachined probe card having compliant contact members for testing semiconductor wafers | 168 | 1996 | |
| 6,071,009 Semiconductor wirebond machine leadframe thermal map system | 41 | 1997 | |
| 6,181,144 Semiconductor probe card having resistance measuring circuitry and method fabrication | 130 | 1998 | |
| 6,194,720 Preparation of transmission electron microscope samples | 106 | 1998 | |
| 6,359,456 Probe card and test system for semiconductor wafers | 112 | 2001 | |
| 6,924,653 Selectively configurable microelectronic probes | 57 | 2002 | |
| 7,026,835 Engagement probe having a grouping of projecting apexes for engaging a conductive pad | 91 | 2002 | |
| 7,009,188 Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same | 95 | 2004 | |
|
|
|||
| 4,739,259 Telescoping pin probe | 99 | 1986 | |
| 4,673,839 Piezoelectric pressure sensing apparatus for integrated circuit testing stations | 121 | 1986 | |
| 4,734,641 Method for the thermal characterization of semiconductor packaging systems | 59 | 1987 | |
| 4,749,942 Wafer probe head | 81 | 1987 | |
| 4,912,399 Multiple lead probe for integrated circuits in wafer form | 112 | 1987 | |
| 4,783,625 Wideband high impedance card mountable probe | 95 | 1988 | |
| 4,965,514 Apparatus for probing a microwave circuit | 17 | 1989 | |
| 5,059,898 Wafer probe with transparent loading member | 76 | 1990 | |
| 5,136,237 Double insulated floating high voltage test probe | 102 | 1991 | |
| 5,412,330 Optical module for an optically based measurement system | 92 | 1993 | |
| 6,447,339 Adapter for a multi-channel signal probe | 83 | 2001 | |
| 6,701,265 Calibration for vector network analyzer | 90 | 2002 | |
|
|
|||
| 5,521,518 Probe card apparatus | 130 | 1991 | |
| 5,180,977 Membrane probe contact bump compliancy system | 139 | 1991 | |
| 5,422,574 Large scale protrusion membrane for semiconductor devices under test with very high pin counts | 164 | 1993 | |
| 5,720,098 Method for making a probe preserving a uniform stress distribution under deflection | 107 | 1995 | |
| 5,742,174 Membrane for holding a probe tip in proper location | 124 | 1995 | |
| 5,623,213 Membrane probing of circuits | 92 | 1996 | |
| 6,037,785 Probe card apparatus | 106 | 1996 | |
| 5,973,504 Programmable high-density electronic device testing | 97 | 1997 | |
| 6,908,364 Method and apparatus for probe tip cleaning and shaping pad | 55 | 2001 | |
|
|
|||
| 5,172,049 IC test equipment | 126 | 1991 | |
| 5,644,248 Test head cooling system | 82 | 1995 | |
| 5,767,690 Test head cooling system | 86 | 1997 | |
| 6,191,596 Method for detecting a contact position between an object to be measured and measuring pins | 79 | 1998 | |
| 6,174,744 Method of producing micro contact structure and contact probe using same | 135 | 2000 | |
| 2002/0011,863 IC chip tester with heating element for preventing condensation | 85 | 2001 | |
| 7,020,360 Wavelength dispersion probing system | 91 | 2002 | |
| 6,937,040 Probe module and a testing apparatus | 57 | 2004 | |
|
|
|||
| 4,871,883 Electro-magnetic shielding | 114 | 1987 | |
| 4,859,989 Security system and signal carrying member thereof | 127 | 1987 | |
| 5,061,823 Crush-resistant coaxial transmission line | 119 | 1990 | |
| 5,107,076 Easy strip composite dielectric coaxial signal cable | 117 | 1991 | |
| 5,477,011 Low noise signal transmission cable | 102 | 1994 | |
| 5,896,038 Method of wafer level burn-in | 104 | 1996 | |
| 6,032,714 Repeatably positionable nozzle assembly | 77 | 1999 | |
| 7,015,708 Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts | 93 | 2003 | |
|
|
|||
| 4,755,747 Wafer prober and a probe card to be used therewith | 105 | 1985 | |
| 4,864,227 Wafer prober | 125 | 1988 | |
| 4,929,893 Wafer prober | 158 | 1988 | |
| 5,145,552 Process for preparing electrical connecting member | 66 | 1990 | |
| 5,304,924 Edge detector | 97 | 1992 | |
| 5,731,920 Converting adapter for interchangeable lens assembly | 91 | 1995 | |
| 5,685,232 Positioning stage device exposure apparatus and device manufacturing method utilizing the same | 112 | 1996 | |
|
|
|||
| 5,172,050 Micromachined semiconductor probe card | 269 | 1991 | |
| 5,177,438 Low resistance probe for semiconductor | 164 | 1991 | |
| 5,467,024 Integrated circuit test with programmable source for both AC and DC modes of operation | 84 | 1993 | |
| 5,617,035 Method for testing integrated devices | 108 | 1995 | |
| 5,666,063 Method and apparatus for testing an integrated circuit | 105 | 1996 | |
| 5,982,166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control | 106 | 1997 | |
| 6,127,831 Method of testing a semiconductor device by automatically measuring probe tip parameters | 100 | 1997 | |
|
|
|||
| 6,091,255 System and method for tasking processing modules based upon temperature | 124 | 1998 | |
| 6,608,494 Single point high resolution time resolved photoemission microscopy system and method | 107 | 1998 | |
| 6,483,327 Quadrant avalanche photodiode time-resolved detection | 103 | 1999 | |
| 6,724,928 Real-time photoemission detection system | 95 | 2000 | |
| 6,488,405 Flip chip defect analysis using liquid crystal | 97 | 2000 | |
| 6,617,862 Laser intrusive technique for locating specific integrated circuit current paths | 96 | 2002 | |
| 7,022,976 Dynamically adjustable probe tips | 93 | 2003 | |
|
|
|||
| 4,727,319 Apparatus for on-wafer testing of electrical circuits | 74 | 1985 | |
| 4,772,846 Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy | 129 | 1986 | |
| 4,908,570 Method of measuring FET noise parameters | 43 | 1987 | |
| 5,313,157 Probe for jesting an electrical circuit chip | 91 | 1992 | |
| 5,583,445 Opto-electronic membrane probe | 99 | 1994 | |
| 5,611,008 Substrate system for optoelectronic/microwave circuits | 80 | 1996 | |
| 5,623,214 Multiport membrane probe for full-wafer testing | 105 | 1996 | |
|
|
|||
| 7,019,701 Antenna device mounted on vehicle | 74 | 2004 | |
| 6,900,647 Contact probe and probe device | 102 | 2004 | |
| 6,903,563 Contact probe and probe device | 96 | 2004 | |
| 6,917,211 Contact probe and probe device | 54 | 2004 | |
| 6,919,732 Contact probe and probe device | 55 | 2004 | |
| 6,937,042 Contact probe and probe device | 55 | 2004 | |
| 7,015,710 Contact probe and probe device | 93 | 2004 | |
|
|
|||
| 4,839,587 Test fixture for tab circuits and devices | 124 | 1988 | |
| 5,198,753 Integrated circuit test fixture and method | 123 | 1990 | |
| 5,691,503 Electro-magnetically shielded door hinge | 41 | 1994 | |
| 6,233,613 High impedance probe for monitoring fast ethernet LAN links | 91 | 1997 | |
| 2004/0201,388 Support for an electronic probe and related methods | 39 | 2003 | |
| 7,002,133 Detecting one or more photons from their interactions with probe photons in a matter system | 91 | 2003 | |
|
|
|||
| 5,408,188 High frequency wafer probe including open end waveguide | 74 | 1992 | |
| 5,493,236 Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis | 182 | 1994 | |
| 6,144,212 Vertical needle type probe card, method of manufacturing thereof, method of replacing defective probe needle and test method of wafer using the probe card | 104 | 1998 | |
| 6,242,929 Probe needle for vertical needle type probe card and fabrication thereof | 86 | 1998 | |
| 6,404,213 Probe stylus | 82 | 1999 | |
| 7,173,433 Circuit property measurement method | 19 | 2005 | |
|
|
|||
| 5,854,608 Helical antenna having a solid dielectric core | 112 | 1994 | |
| 6,184,845 Dielectric-loaded antenna | 121 | 1997 | |
| 6,181,297 Antenna | 88 | 1998 | |
| 6,369,776 Antenna | 86 | 1999 | |
| 6,424,316 Helical antenna | 84 | 2000 | |
| 6,914,580 Dielectrically-loaded antenna | 80 | 2003 | |
|
|
|||
| 4,983,910 Millimeter-wave active probe | 68 | 1988 | |
| 4,916,002 Microcasting of microminiature tips | 133 | 1989 | |
| 5,003,253 Millimeter-wave active probe system | 75 | 1989 | |
| 5,847,569 Electrical contact probe for sampling high frequency electrical signals | 94 | 1996 | |
| 5,981,268 Hybrid biosensors | 140 | 1997 | |
| 6,051,422 Hybrid biosensors | 119 | 1998 | |
|
|
|||
| 5,916,689 Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect | 105 | 1996 | |
| 5,874,361 Method of processing a wafer within a reaction chamber | 104 | 1996 | |
| 6,257,564 Vacuum chuck having vacuum-nipples wafer support | 98 | 1998 | |
| 6,232,787 Microstructure defect detection | 151 | 1999 | |
| 7,319,335 Configurable prober for TFT LCD array testing | 20 | 2004 | |
|
|
|||
| 5,408,189 Test fixture alignment system for printed circuit boards | 141 | 1992 | |
| 5,289,117 Testing of integrated circuit devices on loaded printed circuit | 54 | 1992 | |
| 5,389,885 Expandable diaphragm test modules and connectors | 94 | 1993 | |
| 6,181,149 Grid array package test contactor | 95 | 1996 | |
| 6,064,218 Peripherally leaded package test contactor | 102 | 1997 | |
|
|
|||
| 4,918,373 R.F. phase noise test set using fiber optic delay line | 50 | 1988 | |
| 4,835,495 Diode device packaging arrangement | 40 | 1988 | |
| 5,326,412 Method for electrodepositing corrosion barrier on isolated circuitry | 71 | 1992 | |
| 5,512,835 Electrical probe and method for measuring gaps and other discontinuities in enclosures using electrical inductance for RF shielding assessment | 72 | 1992 | |
| 5,412,866 Method of making a cast elastomer/membrane test probe assembly | 119 | 1993 | |
|
|
|||
| 5,944,093 Pickup chuck with an integral heat pipe | 99 | 1997 | |
| 7,020,363 Optical probe for wafer testing | 92 | 2001 | |
| 6,856,129 Current probe device having an integrated amplifier | 89 | 2002 | |
| 2006/0052,075 Testing integrated circuits using high bandwidth wireless technology | 71 | 2004 | |
| 2007/0145,989 Probe card with improved transient power delivery | 16 | 2005 | |
|
|
|||
| 6,376,258 Resonant bio-assay device and test system for detecting molecular binding events | 132 | 2000 | |
| 6,340,568 Method for detecting and classifying nucleic acid hybridization | 79 | 2001 | |
| 6,566,079 Methods for analyzing protein binding events | 93 | 2001 | |
| 2003/0032,000 Method for analyzing cellular events | 87 | 2001 | |
| 2002/0168,659 System and method for characterizing the permittivity of molecular events | 73 | 2002 | |
|
|
|||
| 4,232,398 Radio receiver alignment indicator | 47 | 1978 | |
| 4,453,142 Microstrip to waveguide transition | 104 | 1981 | |
| 4,646,005 Signal probe | 97 | 1984 | |
| 5,561,378 Circuit probe for measuring a differential circuit | 30 | 1994 | |
| 5,748,506 Calibration technique for a network analyzer | 93 | 1996 | |
|
|
|||
| 4,669,805 High frequency connector | 57 | 1985 | |
| 6,114,864 Probe card with plural probe tips on a unitary flexible tongue | 106 | 1997 | |
| 6,310,483 Longitudinal type high frequency probe for narrow pitched electrodes | 99 | 1998 | |
| 6,281,691 Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable | 100 | 1999 | |
| 6,400,168 Method for fabricating probe tip portion composed by coaxial cable | 100 | 2001 | |
|
|
|||
| 4,346,355 Radio frequency energy launcher | 95 | 1980 | |
| 5,069,628 Flexible electrical cable connector with double sided dots | 70 | 1990 | |
| 5,395,253 Membrane connector with stretch induced micro scrub | 114 | 1993 | |
| 5,600,256 Cast elastomer/membrane test probe assembly | 75 | 1995 | |
| 6,211,837 Dual-window high-power conical horn antenna | 75 | 1999 | |
|
|
|||
| 4,975,638 Test probe assembly for testing integrated circuit devices | 143 | 1989 | |
| 5,355,079 Probe assembly for testing integrated circuit devices | 93 | 1993 | |
| 5,959,461 Probe station adapter for backside emission inspection | 117 | 1997 | |
| 6,031,383 Probe station for low current, low voltage parametric measurements using multiple probes | 103 | 1998 | |
| 6,927,586 Temperature compensated vertical pin probing device | 57 | 2003 | |
|
|
|||
| 5,905,421 Apparatus for measuring and/or injecting high frequency signals in integrated systems | 77 | 1997 | |
| 6,169,410 Wafer probe with built in RF frequency conversion module | 83 | 1998 | |
| 6,529,844 Vector network measurement system | 103 | 1999 | |
| 6,943,563 Probe tone S-parameter measurements | 56 | 2002 | |
|
|
|||
| 4,871,964 Integrated circuit probing apparatus | 90 | 1988 | |
| 5,373,231 Integrated circuit probing apparatus including a capacitor bypass structure | 118 | 1993 | |
| 6,603,322 Probe card for high speed testing | 98 | 1996 | |
| 6,118,287 Probe tip structure | 95 | 1997 | |
|
|
|||
| 5,166,893 Portable apparatus having a voltage converter unit removable from a base unit having a removable display unit | 46 | 1992 | |
| 5,491,425 Apparatus for evaluating characteristics of semiconductor device and method of evaluating characteristics of semiconductor device using the same | 10 | 1994 | |
| 6,605,941 Method and apparatus for measuring characteristic of specimen and its application to high frequency response measurement with scanning probe microscopes | 49 | 2001 | |
| 7,032,307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus | 91 | 2004 | |
|
|
|||
| 6,927,079 Method for probing a semiconductor wafer | 101 | 2000 | |
| 6,605,951 Interconnector and method of connecting probes to a die for functional analysis | 101 | 2000 | |
| 6,617,866 Apparatus and method of protecting a probe card during a sort sequence | 36 | 2001 | |
| 7,023,225 Wafer-mounted micro-probing platform | 92 | 2003 | |
|
|
|||
| 5,594,358 Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line | 96 | 1994 | |
| 5,794,133 Microwave mixing circuit | 81 | 1996 | |
| 6,806,836 Helical antenna apparatus provided with two helical antenna elements, and radio communication apparatus provided with same helical antenna apparatus | 73 | 2003 | |
| 7,219,416 Method of manufacturing a magnetic element | 20 | 2004 | |
|
|
|||
| 4,757,255 Environmental box for automated wafer probing | 180 | 1986 | |
| 5,814,847 General purpose assembly programmable multi-chip package substrate | 88 | 1996 | |
| 5,883,522 Apparatus and method for retaining a semiconductor wafer during testing | 105 | 1996 | |
| 7,096,133 Method of establishing benchmark for figure of merit indicative of amplifier flicker noise | 71 | 2005 | |
|
|
|||
| 6,028,435 Semiconductor device evaluation system using optical fiber | 105 | 1997 | |
| 6,160,407 Inspection method and wiring current observation method for semiconductor device and apparatus of the same | 96 | 1998 | |
| 6,900,646 Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof | 95 | 2002 | |
| 6,551,884 Semiconductor device including gate insulation films having different thicknesses | 69 | 2002 | |
|
|
|||
| 4,893,914 Test station | 110 | 1988 | |
| 5,892,539 Portable emission microscope workstation for failure analysis | 115 | 1995 | |
| 6,744,268 High resolution analytical probe station | 117 | 2002 | |
| 6,917,195 Wafer probe station | 54 | 2004 | |
|
|
|||
| 4,754,239 Waveguide to stripline transition assembly | 89 | 1986 | |
| 5,631,571 Infrared receiver wafer level probe testing | 132 | 1996 | |
| 6,215,295 Photonic field probe and calibration means thereof | 111 | 1998 | |
| 2003/0170,898 Method for intracellular modifications within living cells using pulsed electric fields | 102 | 2002 | |
|
|
|||
| 5,361,049 Transition from double-ridge waveguide to suspended substrate | 46 | 1986 | |
| 5,091,732 Lightweight deployable antenna system | 86 | 1990 | |
| 5,430,813 Mode-matched, combination taper fiber optic probe | 60 | 1993 | |
| 6,940,264 Near field probe | 57 | 2004 | |
|
|
|||
| 5,656,942 Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane | 106 | 1995 | |
| 6,096,567 Method and apparatus for direct probe sensing | 138 | 1997 | |
| 6,320,372 Apparatus and method for testing a substrate having a plurality of terminals | 99 | 1999 | |
|
|
|||
| 4,287,473 Nondestructive method for detecting defects in photodetector and solar cell devices | 107 | 1979 | |
| 5,523,694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration | 118 | 1994 | |
| 6,307,672 Microscope collision protection apparatus | 79 | 1996 | |
|
|
|||
| 6,927,598 Test probe for electrical devices having low or no wedge depression | 55 | 2003 | |
| 6,911,826 Pulsed eddy current sensor probes and inspection methods | 61 | 2003 | |
| 7,015,690 Omnidirectional eddy current probe and inspection system | 96 | 2004 | |
|
|
|||
| 2004/0021,475 Wafer prober | 79 | 2003 | |
| 2004/0134,899 Ceramic substrate for a semiconductor-production/inspection device | 78 | 2003 | |
| 2004/0207,072 Ceramic substrate for a semiconductor producing/examining device | 82 | 2004 | |
|
|
|||
| 5,704,355 Non-invasive system for breast cancer detection | 113 | 1995 | |
| 5,829,437 Microwave method and system to detect and locate cancers in heterogenous tissues | 117 | 1996 | |
| 6,061,589 Microwave antenna for cancer detection system | 113 | 1997 | |
|
|
|||
| 5,097,207 Temperature stable cryogenic probe station | 105 | 1989 | |
| 5,160,883 Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support | 94 | 1990 | |
| 5,166,606 High efficiency cryogenic test station | 93 | 1990 | |
|
|
|||
| 5,970,429 Method and apparatus for measuring electrical noise in devices | 115 | 1997 | |
| 6,121,836 Differential amplifier | 37 | 1998 | |
| 6,245,692 Method to selectively heat semiconductor wafers | 89 | 1999 | |
|
|
|||
| 5,621,333 Contact device for making connection to an electronic circuit device | 90 | 1995 | |
| 6,046,599 Method and device for making connection | 65 | 1997 | |
| 6,091,256 Contact device for making connection to an electronic circuit device | 62 | 1997 | |
|
|
|||
| 5,751,153 Method and apparatus for characterizing a multiport circuit | 39 | 1996 | |
| 5,793,213 Method and apparatus for calibrating a network analyzer | 92 | 1996 | |
| 5,751,252 Method and antenna for providing an omnidirectional pattern | 84 | 1997 | |
|
|
|||
| 5,811,751 Multi-wavelength laser system, probe station and laser cutter system using the same | 134 | 1997 | |
| 6,573,702 Method and apparatus for cleaning electronic test contacts | 99 | 1997 | |
| 5,963,364 Multi-wavelength variable attenuator and half wave plate | 115 | 1997 | |
|
|
|||
| 4,216,467 Hand controller | 186 | 1977 | |
| 4,581,679 Multi-element circuit construction | 99 | 1985 | |
| 2005/0026,276 Remote detection and analysis of chemical and biological aerosols | 77 | 2003 | |
|
|
|||
| 5,367,165 Cantilever chip for scanning probe microscope | 73 | 1993 | |
| 6,006,002 Rigid sleeve device fitted over a flexible insertion section of an endoscope for inspecting industrial equipment | 49 | 1995 | |
| 6,811,406 Microelectronic spring with additional protruding member | 145 | 2001 | |
|
|
|||
| 6,970,001 Variable impedance test probe | 72 | 2003 | |
| 6,900,653 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof | 104 | 2003 | |
| 6,909,297 Probe card | 54 | 2004 | |
|
|
|||
| 4,899,126 Thick film resistor type printed circuit board | 70 | 1989 | |
| 5,089,774 Apparatus and a method for checking a semiconductor | 126 | 1990 | |
| 5,374,938 Waveguide to microstrip conversion means in a satellite broadcasting adaptor | 93 | 1993 | |
|
|
|||
| 4,275,446 Method and apparatus for measurement of attenuation and distortion by a test object | 100 | 1979 | |
| 4,805,627 Method and apparatus for identifying the distribution of the dielectric constants in an object | 97 | 1986 | |
| 5,095,891 Connecting cable for use with a pulse generator and a shock wave generator | 96 | 1987 | |
|
|
|||
| 6,362,792 Antenna apparatus and portable radio set | 76 | 2000 | |
| 6,366,247 Antenna device and portable radio set | 81 | 2000 | |
| 8,035,987 Electronic device having a groove partitioning functional and mounting parts from each other | 34 | 2007 | |
|
|
|||
| 6,822,463 Active differential test probe with a transmission line input structure | 74 | 2002 | |
| 6,870,359 Self-calibrating electrical test probe | 27 | 2002 | |
| 7,019,544 Transmission line input structure test probe | 93 | 2004 | |
|
|
|||
| 4,727,637 Computer aided connector assembly method and apparatus | 109 | 1987 | |
| 5,202,648 Hermetic waveguide-to-microstrip transition module | 53 | 1991 | |
| 6,914,427 Eddy current probe having sensing elements defined by first and second elongated coils and an associated inspection method | 58 | 2003 | |
|
|
|||
| 5,528,158 Probe card changer system and method | 103 | 1994 | |
| 5,506,498 Probe card system and method | 95 | 1995 | |
| 6,166,553 Prober-tester electrical interface for semiconductor test | 95 | 1998 | |
|
|
|||
| 6,812,718 Massively parallel interface for electronic circuits | 101 | 2001 | |
| 6,917,525 Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs | 94 | 2002 | |
|
|
|||
| 6,295,729 Angled flying lead wire bonding process | 73 | 1998 | |
| 6,708,403 Angled flying lead wire bonding process | 65 | 2003 | |
|
|
|||
| 6,340,895 Wafer-level burn-in and test cartridge | 99 | 1999 | |
| 6,580,283 Wafer level burn-in and test methods | 85 | 1999 | |
|
|
|||
| 6,211,663 Baseband time-domain waveform measurement method | 112 | 1999 | |
| 6,396,298 Active feedback pulsed measurement method | 86 | 2000 | |
|
|
|||
| 4,225,819 Circuit board contact contamination probe | 56 | 1978 | |
| 4,684,883 Method of manufacturing high-quality semiconductor light-emitting devices | 93 | 1985 | |
|
|
|||
| 5,376,790 Scanning probe microscope | 111 | 1992 | |
| 5,672,816 Large stage system for scanning probe microscopes and other instruments | 114 | 1995 | |
|
|
|||
| 5,316,435 Three function control system | 49 | 1992 | |
| 5,360,312 Three function control mechanism | 48 | 1992 | |
|
|
|||
| 4,531,474 Rotary board treating apparatus | 87 | 1984 | |
| 4,746,857 Probing apparatus for measuring electrical characteristics of semiconductor device formed on wafer | 94 | 1986 | |
|
|
|||
| 5,530,372 Method of probing a net of an IC at an optimal probe-point | 115 | 1994 | |
| 5,675,499 Optimal probe point placement | 106 | 1996 | |
|
|
|||
| 4,904,935 Electrical circuit board text fixture having movable platens | 111 | 1988 | |
| 5,471,185 Electrical circuit protection devices comprising conductive liquid compositions | 31 | 1994 | |
|
|
|||
| 6,064,217 Fine pitch contact device employing a compliant conductive polymer bump | 129 | 1996 | |
| 2002/0011,859 METHOD FOR FORMING CONDUCTIVE BUMPS FOR THE PURPOSE OF CONTRRUCTING A FINE PITCH TEST DEVICE | 104 | 1998 | |
|
|
|||
| 5,020,219 Method of making a flexible tester surface for testing integrated circuits | 160 | 1989 | |
| 5,453,404 Method for making an interconnection structure for integrated circuits | 124 | 1994 | |
|
|
|||
| 5,715,819 Microwave tomographic spectroscopy system and method | 101 | 1994 | |
| 6,490,471 Electromagnetical imaging and therapeutic (EMIT) systems | 85 | 2001 | |
|
|
|||
| 6,798,226 Multiple local probe measuring device and method | 88 | 2002 | |
| 6,943,574 Multiple local probe measuring device and method | 59 | 2004 | |
|
|
|||
| 4,795,962 Floating driver circuit and a device for measuring impedances of electrical components | 93 | 1987 | |
| 5,133,119 Shearing stress interconnection apparatus and method | 64 | 1991 | |
|
|
|||
| 7,012,871 Information recording method and apparatus with suppressed mark edge jitters | 76 | 2004 | |
| 2005/0186,696 Gas flowmeter and manufacturing method thereof | 2005 | ||
|
|
|||
| 6,049,216 Contact type prober automatic alignment | 91 | 1997 | |
| 7,012,441 High conducting thin-film nanoprobe card and its fabrication method | 102 | 2003 | |
|
|
|||
| 5,900,737 Method and apparatus for automated docking of a test head to a device handler | 112 | 1996 | |
| 6,259,260 Apparatus for coupling a test head and probe card in a wafer testing system | 11 | 1998 | |
|
|
|||
| 4,589,815 Electronic test head positioner for test systems | 48 | 1983 | |
| 4,705,447 Electronic test head positioner for test systems | 127 | 1985 | |
|
|
|||
| 5,888,075 Auxiliary apparatus for testing device | 76 | 1997 | |
| 6,019,612 Electrical connecting apparatus for electrically connecting a device to be tested | 83 | 1998 | |
|
|
|||
| 6,633,174 Stepper type test structures and methods for inspection of semiconductor integrated circuits | 98 | 2000 | |
| 6,771,806 Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices | 125 | 2000 | |
|
|
|||
| 5,653,939 Optical and electrical methods and apparatus for molecule detection | 402 | 1995 | |
| 5,998,768 Active thermal control of surfaces by steering heating beam in response to sensed thermal radiation | 98 | 1998 | |
|
|
|||
| 5,841,288 Two-dimensional microwave imaging apparatus and methods | 112 | 1997 | |
| 6,448,788 Fixed array microwave imaging apparatus and method | 98 | 2000 | |
|
|
|||
| 5,280,156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means | 201 | 1991 | |
| 6,001,760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck | 113 | 1997 | |
|
|
|||
| 6,628,503 Gas cooled electrostatic pin chuck for vacuum applications | 94 | 2001 | |
| 2002/0176,160 Microscope system | 36 | 2002 | |
|
|
|||
| 5,479,109 Testing device for integrated circuits on wafer | 116 | 1994 | |
| 6,040,739 Waveguide to microstrip backshort with external spring compression | 67 | 1998 | |
|
|
|||
| 4,284,033 Means to orbit and rotate target wafers supported on planet member | 112 | 1979 | |
| 4,651,115 Waveguide-to-microstrip transition | 79 | 1985 | |
|
|
|||
| 5,270,664 Probe for measuring surface roughness by sensing fringe field capacitance effects | 121 | 1992 | |
| 6,909,983 Calibration of an analogue probe | 63 | 2002 | |
|
|
|||
| 6,066,911 Ultrasonic driving element | 117 | 1998 | |
| 6,948,981 Compact coupler plug, particularly for a planar broadband lambda probe, in which single-conductor seals are prevented from being lost | 53 | 2002 | |
|
|
|||
| 5,159,264 Pneumatic energy fluxmeter | 78 | 1991 | |
| 5,159,267 Pneumatic energy fluxmeter | 80 | 1992 | |
|
|
|||
| 6,582,979 Structure and method for fabrication of a leadless chip carrier with embedded antenna | 86 | 2001 | |
| 6,770,955 Shielded antenna in a semiconductor package | 83 | 2001 | |
|
|
|||
| 6,900,652 Flexible membrane probe and method of use thereof | 104 | 2003 | |
| 7,023,231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof | 92 | 2004 | |
|
|
|||
| 5,669,316 Turntable for rotating a wafer carrier | 98 | 1993 | |
| 2007/0024,506 Systems and methods for high frequency parallel transmissions | 77 | 2006 | |
|
|
|||
| 6,906,543 Probe card for electrical testing a chip in a wide temperature range | 60 | 2003 | |
| 7,253,646 Probe card with tunable stage and at least one replaceable probe | 10 | 2005 | |
|
|
|||
| 6,146,908 Method of manufacturing a test circuit on a silicon wafer | 31 | 1999 | |
| 6,480,013 Method for the calibration of an RF integrated circuit probe | 99 | 2000 | |
|
|
|||
| 4,991,290 Flexible electrical interconnect and method of making | 100 | 1989 | |
| 5,170,930 Liquid metal paste for thermal and electrical connections | 77 | 1991 | |
|
|
|||
| 6,909,300 Method for fabricating microelectronic fabrication electrical test apparatus electrical probe tip having pointed tips | 54 | 2002 | |
| 6,902,941 Probing of device elements | 98 | 2003 | |
|
|
|||
| 5,510,792 Anechoic chamber and wave absorber | 92 | 1994 | |
| 7,012,425 Eddy-current probe | 93 | 2005 | |
|
|
|||
| 4,600,907 Coplanar microstrap waveguide interconnector and method of interconnection | 52 | 1985 | |
| 4,626,805 Surface mountable microwave IC package | 55 | 1985 | |
|
|
|||
| 4,755,746 Apparatus and methods for semiconductor wafer testing | 154 | 1985 | |
| 5,852,232 Acoustic sensor as proximity detector | 116 | 1997 | |
|
|
|||
| 6,201,453 H-plane hermetic sealed waveguide probe | 12 | 1998 | |
| 6,731,804 Thermal luminescence liquid monitoring system and method | 73 | 2000 | |
|
|
|||
| 4,468,629 NPN Operational amplifier | 76 | 1982 | |
| 5,126,696 W-Band waveguide variable controlled oscillator | 41 | 1991 | |
|
|
|||
| 4,568,890 Microwave oscillator injection locked at its fundamental frequency for producing a harmonic frequency output | 22 | 1983 | |
| 4,663,840 Method of interconnecting conductors of different layers of a multilayer printed circuit board | 72 | 1985 | |
|
|
|||
| 5,565,881 Balun apparatus including impedance transformer having transformation length | 77 | 1994 | |
| 5,628,057 Multi-port radio frequency signal transformation network | 96 | 1996 | |
|
|
|||
| 4,780,670 Active probe card for high resolution/low noise wafer level testing | 132 | 1985 | |
| 6,352,454 Wear-resistant spring contacts | 81 | 1999 | |
|
|
|||
| 6,922,069 Needle assembly of probe card | 60 | 2003 | |
| 7,014,499 Probe card for testing semiconductor device | 91 | 2005 | |
|
|
|||
| 6,902,416 High density probe device | 73 | 2002 | |
|
|
|||
| 4,998,063 Fiber optic coupled magneto-optic sensor having a concave reflective focusing surface | 39 | 1989 | |
|
|
|||
| 2005/0165,316 Method for detecting artifacts in data | 74 | 2004 | |
|
|
|||
| 4,621,169 Electric cable construction and uses therefor | 92 | 1985 | |
|
|
|||
| 5,642,298 Wafer testing and self-calibration system | 105 | 1996 | |
|
|
|||
| 6,396,296 Method and apparatus for electrical characterization of an integrated circuit package using a vertical probe station | 95 | 2000 | |
|
|
|||
| 4,684,884 Universal test circuit for integrated circuit packages | 74 | 1985 | |
|
|
|||
| 6,933,717 Sensors and probes for mapping electromagnetic fields | 57 | 2004 | |
|
|
|||
| 6,924,655 Probe card for use with microelectronic components, and methods for making same | 55 | 2003 | |
|
|
|||
| 4,725,793 Waveguide-microstrip line converter | 84 | 1986 | |
|
|
|||
| 5,813,847 Device and method for injecting fuels into compressed gaseous media | 75 | 1996 | |
|
|
|||
| 4,652,082 Angled electro optic connector | 56 | 1984 | |
|
|
|||
| 4,375,631 Joystick control | 61 | 1981 | |
|
|
|||
| 2001/0054,906 Probe card and a method of manufacturing the same | 76 | 2001 | |
|
|
|||
| 6,937,045 Shielded integrated circuit probe | 61 | 2004 | |
|
|
|||
| 6,707,548 Systems and methods for filter based spectrographic analysis | 95 | 2001 | |
|
|
|||
| 5,267,088 Code plate mounting device | 82 | 1990 | |
|
|
|||
| 4,837,507 High frequency in-circuit test fixture | 73 | 1987 | |
|
|
|||
| 7,015,711 Apparatus and method for the testing of circuit boards, and test probe for this apparatus and this method | 103 | 2004 | |
|
|
|||
| 4,649,339 Integrated circuit interface | 113 | 1984 | |
|
|
|||
| 5,659,421 Slide positioning and holding device | 102 | 1995 | |
|
|
|||
| 5,066,357 Method for making flexible circuit card with laser-contoured vias and machined capacitors | 106 | 1990 | |
|
|
|||
| 5,202,558 Flexible fiber optic probe for high-pressure shock experiments | 101 | 1992 | |
|
|
|||
| 6,147,502 Method and apparatus for measuring butterfat and protein content using microwave absorption techniques | 77 | 1998 | |
|
|
|||
| 5,369,368 Device for determining material parameters by means of microwave measurements | 78 | 1993 | |
|
|
|||
| 4,223,658 Elastic band projecting toy gun | 50 | 1978 | |
|
|
|||
| 5,082,627 Three dimensional binding site array for interfering with an electrical field | 83 | 1987 | |
|
|
|||
| 5,233,306 Method and apparatus for measuring the permittivity of materials | 99 | 1991 | |
|
|
|||
| 2003/0119,057 Forming and modifying dielectrically-engineered microparticles | 95 | 2001 | |
|
|
|||
| 7,088,981 Apparatus for reducing flicker noise in a mixer circuit | 93 | 2001 | |
|
|
|||
| 5,539,323 Sensor for articles such as wafers on end effector | 115 | 1993 | |
|
|
|||
| 6,933,725 NMR probe circuit for generating close frequency resonances | 59 | 2004 | |
|
|
|||
| 5,138,289 Noncontacting waveguide backshort | 40 | 1990 | |
|
|
|||
| 2004/0175,294 Apparatus and method for analysing a biological sample in response to microwave radiation | 73 | 2004 | |
|
|
|||
| 4,515,439 Attachment of microscope objectives | 77 | 1982 | |
|
|
|||
| 4,306,235 Multiple frequency microwave antenna | 40 | 1978 | |
|
|
|||
| 6,002,426 Inverted alignment station and method for calibrating needles of probe card for probe testing of integrated circuits | 108 | 1997 | |
|
|
|||
| 5,479,108 Method and apparatus for handling wafers | 155 | 1992 | |
|
|
|||
| 6,946,860 Modularized probe head | 54 | 2003 | |
|
|
|||
| 6,759,859 Resilient and rugged multi-layered probe | 32 | 2001 | |
|
|
|||
| 4,793,814 Electrical circuit board interconnect | 254 | 1986 | |
|
|
|||
| 6,222,970 Methods and apparatus for filtering an optical fiber | 129 | 1999 | |
|
|
|||
| 5,841,342 Voltage controlled superconducting microwave switch and method of operation thereof | 40 | 1995 | |
|
|
|||
| 6,407,542 Implementation of a multi-port modal decomposition system | 42 | 2000 | |
|
|
|||
| 5,500,606 Completely wireless dual-access test fixture | 112 | 1993 | |
|
|
|||
| 5,293,175 Stacked dual dipole MMDS feed | 133 | 1993 | |
|
|
|||
| 4,184,729 Flexible connector cable | 104 | 1977 | |
|
|
|||
| 5,883,523 Coherent switching power for an analog circuit tester | 102 | 1997 | |
|
|
|||
| 6,130,536 Preform test fixture and method of measuring a wall thickness | 37 | 1998 | |
|
|
|||
| 7,019,541 Electric conductivity water probe | 94 | 2004 | |
|
|
|||
| 6,091,236 System and method for measuring and analyzing electrical signals on the shaft of a machine | 93 | 1997 | |
|
|
|||
| 6,778,140 Atch horn antenna of dual frequency | 71 | 2003 | |
|
|
|||
| 4,588,950 Test system for VLSI digital circuit and method of testing | 91 | 1983 | |
|
|
|||
| 7,005,078 Micromachined fluidic device and method for making same | 116 | 2001 | |
|
|
|||
| 7,015,709 Ultra-broadband differential voltage probes | 97 | 2004 | |
|
|
|||
| 4,980,638 Microcircuit probe and method for manufacturing same | 25 | 1989 | |
|
|
|||
| 5,041,782 Microstrip probe | 94 | 1989 | |
|
|
|||
| 4,685,150 Tuning of a resonant circuit in a communications receiver | 53 | 1984 | |
|
|
|||
| 6,627,461 Method and apparatus for detection of molecular events using temperature control of detection environment | 89 | 2001 | |
|
|
|||
| 6,013,586 Tent material product and method of making tent material product | 88 | 1997 | |
|
|
|||
| 4,357,575 Apparatus for use in testing printed circuit process boards having means for positioning such boards in proper juxtaposition with electrical contacting assemblies | 114 | 1980 | |
|
|
|||
| 6,265,950 Transition from a waveguide to a strip transmission line | 84 | 1999 | |
|
|
|||
| 6,636,182 Structural antenna for flight aggregates or aircraft | 72 | 2001 | |
|
|
|||
| 5,879,289 Hand-held portable endoscopic camera | 141 | 1996 | |
|
|
|||
| 5,848,500 Light-tight enclosure and joint connectors for enclosure framework | 101 | 1997 | |
|
|
|||
| 5,728,091 Optical fiber for myocardial channel formation | 55 | 1995 | |
|
|
|||
| 4,755,874 Emission microscopy system | 154 | 1987 | |
|
|
|||
| 4,487,996 Shielded electrical cable | 103 | 1982 | |
|
|
|||
| 6,100,815 Compound switching matrix for probing and interconnecting devices under test to measurement equipment | 90 | 1997 | |
|
|
|||
| 2004/0100,276 Method and apparatus for calibration of a vector network analyzer | 98 | 2002 | |
|
|
|||
| 7,319,337 Method and apparatus for pad aligned multiprobe wafer testing | 19 | 2007 | |
|
|
|||
| 5,214,243 High-temperature, low-noise coaxial cable assembly with high strength reinforcement braid | 123 | 1991 | |
|
|
|||
| 5,214,374 Dual level test fixture | 99 | 1991 | |
|
|
|||
| 5,357,211 Pin driver amplifier | 81 | 1993 | |
|
|
|||
| 4,972,073 Light wave conductor-bending sensor with sliding rails for monitoring bridge structures or the like | 46 | 1990 | |
|
|
|||
| 5,397,855 Low noise cable | 92 | 1993 | |
|
|
|||
| 5,281,364 Liquid metal electrical contact compositions | 13 | 1992 | |
|
|
|||
| 6,384,614 Single tip Kelvin probe | 100 | 2000 | |
|
|
|||
| 6,937,037 Probe card assembly for contacting a device with raised contact elements | 59 | 2002 | |
|
|
|||
| 5,756,908 Probe positioner | 41 | 1996 | |
|
|
|||
| 6,653,903 Supply voltage decoupling device for HF amplifier circuits | 71 | 2001 | |
|
|
|||
| 5,589,781 Die carrier apparatus | 72 | 1993 | |
|
|
|||
| 4,727,391 Sheet film package and device for loading sheet films | 80 | 1987 | |
|
|
|||
| 4,626,618 DC electric power cable | 97 | 1985 | |
|
|
|||
| 4,425,395 Base fabrics for polyurethane-coated fabrics, polyurethane-coated fabrics and processes for their production | 95 | 1982 | |
|
|
|||
| 6,933,736 Prober | 56 | 2003 | |
|
|
|||
| 5,966,645 Transmitter with low-level modulation and minimal harmonic emissions | 39 | 1997 | |
|
|
|||
| 6,914,244 Ion beam milling system and method for electron microscopy specimen preparation | 78 | 2004 | |
|
|
|||
| 6,229,327 Broadband impedance matching probe | 101 | 1997 | |
|
|
|||
| 6,628,980 Apparatus, systems, and methods for in vivo magnetic resonance imaging | 123 | 2001 | |
|
|
|||
| 4,552,033 Drive system for a microscope stage or the like | 105 | 1984 | |
|
|
|||
| 4,714,873 Microwave noise measuring apparatus | 48 | 1986 | |
|
|
|||
| 2002/0050,828 Multi-feed microwave reflective resonant sensors | 76 | 2001 | |
|
|
|||
| 4,691,163 Dual frequency surface probes | 111 | 1985 | |
|
|
|||
| 4,277,741 Microwave acoustic spectrometer | 81 | 1979 | |
|
|
|||
| 5,869,326 Electroporation employing user-configured pulsing scheme | 113 | 1996 | |
|
|
|||
| 6,481,939 Tool tip conductivity contact sensor and method | 86 | 2001 | |
|
|
|||
| 6,078,500 Pluggable chip scale package | 103 | 1998 | |
|
|
|||
| 4,653,174 Method of making packaged IC chip | 28 | 1986 | |
|
|
|||
| 4,401,945 Apparatus for detecting the position of a probe relative to a workpiece | 95 | 1981 | |
|
|
|||
| 6,409,724 Electrosurgical instrument | 99 | 2000 | |
|
|
|||
| 6,054,869 Bi-level test fixture for testing printed circuit boards | 93 | 1998 | |
|
|
|||
| 4,922,186 Voltage detector | 80 | 1988 | |
|
|
|||
| 4,810,981 Assembly of microwave components | 88 | 1987 | |
|
|
|||
| 7,035,738 Probe designing apparatus and probe designing method | 92 | 2002 | |
|
|
|||
| 6,734,687 Apparatus for detecting defect in device and method of detecting defect | 107 | 2001 | |
|
|
|||
| 5,347,204 Position dependent rate dampening in any active hand controller | 55 | 1992 | |
|
|
|||
| 5,846,708 Optical and electrical methods and apparatus for molecule detection | 271 | 1992 | |
|
|
|||
| 5,995,914 Method and apparatus for asynchronously measuring frequency shifted signals | 99 | 1996 | |
|
|
|||
| 7,002,364 Semiconductor device for reducing the number of probing pad used during wafer test and method for testing the same | 94 | 2003 | |
|
|
|||
| 5,475,316 Transportable image emission microscope | 129 | 1993 | |
|
|
|||
| 4,894,612 Soft probe for providing high speed on-wafer connections to a circuit | 153 | 1988 | |
|
|
|||
| 5,245,292 Method and apparatus for sensing a fluid handling | 73 | 1992 | |
|
|
|||
| 7,006,046 Low cost electronic probe devices manufactured from conductive loaded resin-based materials | 93 | 2004 | |
|
|
|||
| 6,118,894 Integrated circuit probe card inspection system | 113 | 1997 | |
|
|
|||
| 6,236,223 Method and apparatus for wireless radio frequency testing of RFID integrated circuits | 148 | 1999 | |
|
|
|||
| 4,528,504 Pulsed linear integrated circuit tester | 95 | 1982 | |
|
|
|||
| 6,794,934 High gain wideband driver amplifier | 75 | 2001 | |
|
|
|||
| 6,933,737 Probe card | 54 | 2003 | |
|
|
|||
| 6,937,341 System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation | 79 | 2002 | |
|
|
|||
| 6,914,430 NMR probe | 56 | 2004 | |
|
|
|||
| 7,022,985 Apparatus and method for a scanning probe microscope | 97 | 2002 | |
|
|
|||
| 5,678,210 Method and apparatus of coupling a transmitter to a waveguide in a remote ground terminal | 41 | 1995 | |
|
|
|||
| 7,071,722 Anisotropic, conductive sheet and impedance measuring probe | 34 | 2003 | |
|
|
|||
| 4,567,321 Flexible flat cable | 99 | 1984 | |
|
|
|||
| 6,275,738 Microwave devices for medical hyperthermia, thermotherapy and diagnosis | 114 | 1999 | |
|
|
|||
| 6,907,149 Compact optical measurement probe | 61 | 2003 | |
|
|
|||
| 5,227,730 Microwave needle dielectric sensors | 93 | 1992 | |
|
|
|||
| 6,104,206 Product wafer junction leakage measurement using corona and a kelvin probe | 110 | 1997 | |
|
|
|||
| 4,567,436 Magnetic thickness gauge with adjustable probe | 33 | 1982 | |
|
|
|||
| 6,528,993 Magneto-optical microscope magnetometer | 78 | 2000 | |
|
|
|||
| 4,642,417 Concentric three-conductor cable | 112 | 1985 | |
|
|
|||
| 6,987,483 Effectively balanced dipole microstrip antenna | 77 | 2003 | |
|
|
|||
| 5,505,150 Method and apparatus for facilitating loop take time adjustment in multi-needle quilting machine | 84 | 1994 | |
|
|
|||
| 5,148,131 Coaxial-to-waveguide transducer with improved matching | 43 | 1991 | |
|
|
|||
| 7,015,703 Radio frequency Langmuir probe | 93 | 2004 | |
|
|
|||
| 5,097,101 Method of forming a conductive contact bump on a flexible substrate and a flexible substrate | 92 | 1991 | |
|
|
|||
| 4,502,028 Programmable two-port microwave network | 31 | 1982 | |
|
|
|||
| 6,154,238 Scanning print head | 42 | 1997 | |
|
|
|||
| 5,157,790 Firefighter garment with lumbar support | 46 | 1991 | |
|
|
|||
| 2005/0229,053 Circuit and method for low frequency testing of high frequency signal waveforms | 30 | 2004 | |
|
|
|||
| 5,142,224 Non-destructive semiconductor wafer probing system using laser pulses to generate and detect millimeter wave signals | 101 | 1991 | |
|
|
|||
| 4,376,920 Shielded radio frequency transmission cable | 139 | 1981 | |
|
|
|||
| 5,030,907 CAD driven microprobe integrated circuit tester | 110 | 1989 | |
|
|
|||
| 5,867,073 Waveguide to transmission line transition | 82 | 1994 | |
|
|
|||
| 5,266,963 Integrated antenna/mixer for the microwave and millimetric wavebands | 51 | 1991 | |
|
|
|||
| 6,172,337 System and method for thermal processing of a semiconductor substrate | 99 | 1999 | |
|
|
|||
| 4,551,747 Leadless chip carrier apparatus providing for a transmission line environment and improved heat dissipation | 108 | 1982 | |
|
|
|||
| 2005/0168,722 Device and method for measuring constituents in blood | 1 | 2003 | |
|
|
|||
| 5,488,954 Ultrasonic transducer and method for using same | 125 | 1994 | |
|
|
|||
| 2006/0155,270 Tissue ablation apparatus and method of ablating tissue | 94 | 2003 | |
|
|
|||
| 2004/0186,382 Spectral volume microprobe arrays | 74 | 2003 | |
|
|
|||
| 7,003,184 Fiber optic probes | 101 | 2001 | |
|
|
|||
| 5,383,787 Integrated circuit package with direct access to internal signals | 58 | 1993 | |
|
|
|||
| 7,013,221 Iterative probe design and detailed expression profiling with flexible in-situ synthesis arrays | 92 | 2000 | |
|
|
|||
| 2005/0142,033 Modular assay plates, reader systems and methods for test measurements | 52 | 2004 | |
|
|
|||
| 7,188,037 Method and apparatus for testing circuit boards | 76 | 2004 | |
|
|
|||
| 5,764,070 Structure for testing bare integrated circuit devices | 57 | 1996 | |
|
|
|||
| 6,222,031 Process for preparing water-soluble tricarboxypolysaccharide | 80 | 1998 | |
|
|
|||
| 5,164,319 Multiple chemically modulated capacitance determination | 245 | 1989 | |
|
|
|||
| 5,232,789 Structural component with a protective coating having a nickel or cobalt basis and method for making such a coating | 89 | 1992 | |
|
|
|||
| 6,838,885 Method of correcting measurement error and electronic component characteristic measurement apparatus | 97 | 2003 | |
|
|
|||
| 6,816,840 System and method of sending messages to a group of electronic price labels | 37 | 1998 | |
|
|
|||
| 5,481,196 Process and apparatus for microwave diagnostics and therapy | 82 | 1994 | |
|
|
|||
| 6,320,396 Parasitic MIM structural spot analysis method for semiconductor device and parasitic MIM structure spot analysis method for silicon semiconductor device | 97 | 1997 | |
|
|
|||
| 6,727,716 Probe card and probe needle for high frequency testing | 93 | 2002 | |
|
|
|||
| 5,134,365 Probe card in which contact pressure and relative position of each probe end are correctly maintained | 85 | 1991 | |
|
|
|||
| 5,021,186 Chloroisocyanuric acid composition having storage stability | 74 | 1989 | |
|
|
|||
| 5,977,783 Multilayer probe for measuring electrical characteristics | 61 | 1997 | |
|
|
|||
| 4,853,624 Tunable microwave wafer probe | 91 | 1988 | |
|
|
|||
| 6,946,859 Probe structures using clamped substrates with compliant interconnectors | 45 | 2003 | |
|
|
|||
| 6,948,391 Probe with integral vent, sampling port and filter element | 57 | 2003 | |
|
|
|||
| 6,275,043 Test device for testing a module for a data carrier intended for contactless communication | 41 | 1999 | |
|
|
|||
| 6,927,078 Method of measuring contact resistance of probe and method of testing semiconductor device | 58 | 2003 | |
|
|
|||
| 5,688,618 Millimeter wave device and method of making | 41 | 1995 | |
|
|
|||
| 4,788,851 Pressure vessel incorporating a sensor for detecting liquid in a gas chamber | 42 | 1987 | |
|
|
|||
| 4,696,544 Fiberscopic device for inspection of internal sections of construction, and method for using same | 89 | 1985 | |
|
|
|||
| 6,420,722 Method for sample separation and lift-out with one cut | 107 | 2001 | |
|
|
|||
| 6,181,416 Schlieren method for imaging semiconductor device properties | 80 | 1999 | |
|
|
|||
| 6,946,864 Method for measuring product parameters of components formed on a wafer and device for performing the method | 20 | 2002 | |
|
|
|||
| 4,251,772 Probe head for an automatic semiconductive wafer prober | 45 | 1978 | |
|
|
|||
| 4,593,243 Coplanar and stripline probe card apparatus | 112 | 1984 | |
|
|
|||
| 6,335,625 Programmable active microwave ultrafine resonance spectrometer (PAMURS) method and systems | 84 | 2000 | |
|
|
|||
| 5,807,107 Dental infection control system | 90 | 1996 | |
|
|
|||
| 6,418,009 Broadband multi-layer capacitor | 85 | 2000 | |
|
|
|||
| 4,740,764 Pressure sealed waveguide to coaxial line connection | 45 | 1987 | |
|
|
|||
| 2005/0116,730 DOUBLE-FACED DETECTING DEVICES FOR AN ELECTRONIC SUBSTRATE | 27 | 2003 | |
|
|
|||
| 4,636,722 High density probe-head with isolated and shielded transmission lines | 152 | 1984 | |
|
|
|||
| 7,034,553 Direct resistance measurement corrosion probe | 94 | 2003 | |
|
|
|||
| 2001/0044,152 Dual beam, pulse propagation analyzer, medical profiler interferometer | 71 | 2001 | |
|
|
|||
| 2003/0234,659 Electrical isolation between pins sharing the same tester channel | 16 | 2002 | |
|
|
|||
| 2004/0147,034 Method and apparatus for measuring a substance in a biological sample | 112 | 2003 | |
|
|
|||
| 5,803,607 Method and apparatus for measurement of unsteady gas temperatures | 41 | 1997 | |
|
|
|||
| 6,737,920 Variable gain amplifier | 75 | 2002 | |
|
|
|||
| 2002/0070,745 Cooling system for burn-in unit | 82 | 2000 | |
|
|
|||
| 5,686,960 Image input device having optical deflection elements for capturing multiple sub-images | 124 | 1994 | |
|
|
|||
| 5,949,383 Compact antenna structures including baluns | 109 | 1997 | |
|
|
|||
| 6,794,950 Waveguide to microstrip transition | 81 | 2001 | |
|
|
|||
| 5,584,120 Method of manufacturing printed circuits | 75 | 1994 | |
|
|
|||
| 4,636,772 Multiple function type D/A converter | 46 | 1985 | |
|
|
|||
| 6,753,679 Test point monitor using embedded passive resistance | 81 | 2002 | |
|
|
|||
| 4,184,133 Assembly of microwave integrated circuits having a structurally continuous ground plane | 51 | 1977 | |
|
|
|||
| 6,278,411 Horn antenna | 76 | 1999 | |
|
|
|||
| 2004/0066,181 High-frequency probe tip | 79 | 2003 | |
|
|
|||
| 5,126,286 Method of manufacturing edge connected semiconductor die | 143 | 1990 | |
|
|
|||
| 6,710,798 Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card | 105 | 1999 | |
|
|
|||
| 7,015,689 Connection method for probe pins for measurement of characteristics of thin-film magnetic head and characteristic measurement method for thin-film magnetic head | 93 | 2003 | |
|
|
|||
| 6,078,183 Thermally-induced voltage alteration for integrated circuit analysis | 127 | 1998 | |
|
|
|||
| 7,323,680 Optical deflection probe and optical deflection probe device | 19 | 2006 | |
|
|
|||
| 7,030,599 Hand held voltage detection probe | 95 | 2004 | |
|
|
|||
| 5,993,611 Capacitive denaturation of nucleic acid | 100 | 1997 | |
|
|
|||
| 4,766,384 Well logging apparatus for determining dip, azimuth, and invaded zone conductivity | 98 | 1986 | |
|
|
|||
| 6,549,022 Apparatus and method for analyzing functional failures in integrated circuits | 121 | 2000 | |
|
|
|||
| 7,015,455 Near-field optical probe | 91 | 2005 | |
|
|
|||
| 5,550,481 Circuit board test fixture apparatus with cam rotably mounted in slidable cam block and method for making | 40 | 1995 | |
|
|
|||
| 6,114,865 Device for electrically contacting a floating semiconductor wafer having an insulating film | 109 | 1999 | |
|
|
|||
| 6,052,653 Spreading resistance profiling system | 98 | 1997 | |
|
|
|||
| 6,388,455 Method and apparatus for simulating a surface photo-voltage in a substrate | 42 | 2000 | |
|
|
|||
| 4,891,584 Apparatus for making surface photovoltage measurements of a semiconductor | 134 | 1988 | |
|
|
|||
| 5,633,780 Electrostatic discharge protection device | 112 | 1996 | |
|
|
|||
| 4,713,347 Measurement of ligand/anti-ligand interactions using bulk conductance | 190 | 1985 | |
|
|
|||
| 7,057,404 Shielded probe for testing a device under test | 20 | 2003 | |
|
|
|||
| 6,351,885 Method of making conductive bump on wiring board | 60 | 1998 | |
|
|
|||
| 6,639,461 Ultra-wideband power amplifier module apparatus and method for optical and electronic communications | 79 | 2001 | |
|
|
|||
| 6,395,480 Computer program and database structure for detecting molecular binding events | 95 | 1999 | |
|
|
|||
| 6,621,082 Automatic focusing system for scanning electron microscope equipped with laser defect detection function | 97 | 2002 | |
|
|
|||
| 6,476,442 Pseudo-Schottky diode | 86 | 1998 | |
|
|
|||
| 5,876,082 Device for gripping and holding substrates | 68 | 1997 | |
|
|
|||
| 5,824,494 Method for enumerating bacterial populations | 89 | 1995 | |
|
|
|||
| 4,707,657 Connector assembly for a circuit board testing machine, a circuit board testing machine, and a method of testing a circuit board by means of a circuit board testing machine | 147 | 1985 | |
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|
|||
| 4,706,050 Microstrip devices | 77 | 1985 | |
|
|
|||
| 6,753,699 Integrated circuit and method of controlling output impedance | 75 | 2002 | |
|
|
|||
| 6,940,283 Detecting field from different ignition coils using adjustable probe | 52 | 2003 | |
|
|
|||
| 2003/0072,549 Method and apparatus for dielectric spectroscopy of biological solutions | 97 | 2002 | |
|
|
|||
| 5,792,668 Radio frequency spectral analysis for in-vitro or in-vivo environments | 146 | 1996 | |
|
|
|||
| 5,116,180 Human-in-the-loop machine control loop | 238 | 1990 | |
|
|
|||
| 4,916,398 Efficient remote transmission line probe tuning for NMR apparatus | 93 | 1988 | |
|
|
|||
| 4,904,933 Integrated circuit probe station | 111 | 1986 | |
|
|
|||
| 4,476,363 Method and device for heating by microwave energy | 32 | 1983 | |
|
|
|||
| 5,469,324 Integrated decoupling capacitive core for a printed circuit board and method of making same | 119 | 1994 | |
|
|
|||
| 4,818,059 Optical connector and splicer | 83 | 1987 | |
|
|
|||
| 5,627,473 Connector inspection device | 41 | 1995 | |
|
|
|||
| 5,629,838 Apparatus for non-conductively interconnecting integrated circuits using half capacitors | 175 | 1994 | |
|
|
|||
| 6,944,380 Optical fiber for transmitting ultraviolet ray, optical fiber probe, and method of manufacturing the optical fiber probe | 54 | 2002 | |
|
|
|||
| 6,572,608 Directional laser probe | 50 | 2000 | |
|
|
|||
| 6,657,601 Metrology antenna system utilizing two-port, sleeve dipole and non-radiating balancing network | 74 | 2001 | |
|
|
|||
| 2002/0070,743 Testing head having vertical probes | 85 | 2001 | |
|
|
|||
| 5,996,102 Assembly and method for testing integrated circuit devices | 87 | 1997 | |
|
|
|||
| 6,415,858 Temperature control system for a workpiece chuck | 91 | 1997 | |
|
|
|||
| 6,784,679 Differential coaxial contact array for high-density, high-speed signals | 91 | 2002 | |
|
|
|||
| 7,315,175 Probe apparatus and method for examining a sample | 20 | 2002 | |
|
|
|||
| 5,808,874 Microelectronic connections with liquid conductive elements | 63 | 1996 | |
|
|
|||
| 6,906,506 Method and apparatus for simultaneous measurement of electric field and temperature using an electrooptic semiconductor probe | 54 | 2002 | |
|
|
|||
| 5,676,360 Machine tool rotary table locking apparatus | 112 | 1995 | |
|
|
|||
| 4,899,998 Rotational positioning device | 105 | 1988 | |
|
|
|||
| 5,478,748 Protein assay using microwave energy | 87 | 1994 | |
|
|
|||
| 4,901,012 Circuit for measuring the dynamic characteristics of a package for high-speed integrated circuits and a method for measuring said dynamic characteristics | 39 | 1987 | |
|
|
|||
| 4,742,571 Coupling device between a metal wave guide, a dielectric wave guide and a semiconductor component and a mixer using this coupling device | 85 | 1986 | |
|
|
|||
| 6,459,739 Method and apparatus for RF common-mode noise rejection in a DSL receiver | 101 | 1999 | |
|
|
|||
| 5,571,324 Rotary-cup coating apparatus | 102 | 1994 | |
|
|
|||
| 4,491,783 Apparatus for measuring noise factor and available gain | 28 | 1982 | |
|
|
|||
| 2002/0197,174 Electrical pump, and method for using plurality of submersible electrical pumps for well completion | 2002 | ||
|
|
|||
| 5,451,884 Electronic component temperature test system with flat ring revolving carriage | 99 | 1993 | |
|
|
|||
| 4,340,860 Integrated circuit carrier package test probe | 67 | 1980 | |
|
|
|||
| 6,605,955 Temperature controlled wafer chuck system with low thermal resistance | 94 | 2000 | |
|
|
|||
| 4,853,627 Wafer probes | 101 | 1988 | |
|
|
|||
| 5,833,601 Methodology for determining oxygen in biological systems | 76 | 1997 | |
|
|
|||
| 2001/0043,073 PROBER INTERFACE PLATE | 72 | 1999 | |
|
|
|||
| 4,926,172 Joystick controller | 52 | 1988 | |
|
|
|||
| 4,553,111 Printed circuit board maximizing areas for component utilization | 30 | 1983 | |
|
|
|||
| 5,569,591 Analytical or monitoring apparatus and method | 125 | 1994 | |
|
|
|||
| 6,937,020 Solid-state nuclear magnetic resonance probe | 60 | 2004 | |
|
|
|||
| 6,809,533 Quantitative imaging of dielectric permittivity and tunability | 72 | 2002 | |
|
|
|||
| 5,233,197 High speed digital imaging microscope | 110 | 1991 | |
|
|
|||
| 6,278,051 Differential thermopile heat flux transducer | 90 | 2000 | |
|
|
|||
| 7,001,785 Capacitance probe for thin dielectric film characterization | 98 | 2004 | |
|
|
|||
| 7,030,827 Planar antenna and antenna system | 72 | 2004 | |
|
|
|||
| 2005/0068,054 Standardized layout patterns and routing structures for integrated circuit wafer probe card assemblies | 28 | 2004 | |
|
|
|||
| 4,327,180 Method and apparatus for electromagnetic radiation of biological material | 77 | 1979 | |
|
|
|||
| 6,912,468 Method and apparatus for contemporaneous utilization of a higher order probe in pre-stack and post-stack seismic domains | 52 | 2003 | |
|
|
|||
| 4,302,146 Probe positioner | 46 | 1978 | |
|
|
|||
| 4,558,609 Joystick controller with interchangeable handles | 28 | 1983 | |
|
|
|||
| 6,611,417 Wafer chuck system | 79 | 2001 | |
|
|
|||
| 2003/0088,180 Space-time microwave imaging for cancer detection | 94 | 2002 | |
|
|
|||
| 6,512,482 Method and apparatus using a semiconductor die integrated antenna structure | 85 | 2001 | |
|
|
|||
| 5,481,936 Rotary drive positioning system for an indexing table | 110 | 1994 | |
|
|
|||
| 4,330,783 Coaxially fed dipole antenna | 74 | 1979 | |
| 4,284,682 Heat sealable, flame and abrasion resistant coated fabric | 122 | 1980 | |
| 4,383,217 Collinear four-point probe head and mount for resistivity measurements | 84 | 1981 | |
| 4,480,223 Unitary probe assembly | 133 | 1981 | |
| 4,641,659 Medical diagnostic microwave scanning apparatus | 105 | 1982 | |
| 4,563,640 Fixed probe board | 41 | 1982 | |
| 4,515,133 Fuel economizing device | 75 | 1984 | |
| 4,812,754 Circuit board interfacing apparatus | 115 | 1987 | |
| 4,711,563 Portable collapsible darkroom | 88 | 1987 | |
| 4,791,363 Ceramic microstrip probe blade | 135 | 1987 | |
| 4,988,062 Apparatus, system and method for organizing and maintaining a plurality of medical catheters and the like | 91 | 1988 | |
| 4,922,912 MAP catheter | 107 | 1988 | |
| 5,129,006 Electronic audio signal amplifier and loudspeaker system | 20 | 1989 | |
| 5,363,050 Quantitative dielectric imaging system | 102 | 1990 | |
| 5,414,565 Tilting kinematic mount | 83 | 1991 | |
| 5,187,443 Microwave test fixtures for determining the dielectric properties of a material | 77 | 1992 | |
| 5,584,608 Anchored cable sling system | 82 | 1994 | |
| 5,670,322 Multi site molecule detection method | 163 | 1995 | |
| 5,670,888 Method for transporting and testing wafers | 124 | 1995 | |
| 5,621,400 Ice detection method and apparatus for an aircraft | 41 | 1995 | |
| 5,744,971 Device and apparatus for measuring dielectric properties of materials | 86 | 1995 | |
| 5,831,442 Handling device | 94 | 1996 | |
| 5,675,932 Plant growing system | 89 | 1996 | |
| 5,949,579 Flexible darkness adapting viewer | 87 | 1997 | |
| 6,307,363 Ultrahigh-frequency high-impedance passive voltage probe | 46 | 1998 | |
| RE37130 Signal conditioning apparatus | 30 | 1998 | |
| 6,147,851 Method for guarding electrical regions having potential gradients | 89 | 1999 | |
| 6,327,034 Apparatus for aligning two objects | 88 | 1999 | |
| 6,548,311 Device and method for detecting analytes | 98 | 2000 | |
| 2001/0002,794 Split resistor probe and method | 77 | 2001 | |
| 2002/0030,480 Apparatus for the automated testing, calibration and characterization of test adapters | 12 | 2001 | |
| 6,587,327 Integrated broadband ceramic capacitor array | 103 | 2002 | |
| 2003/0076,585 Optical system for enhancing the image from a microscope's high power objective lens | 30 | 2002 | |
| 2003/0139,662 Method and apparatus for detecting, identifying and performing operations on microstructures including, anthrax spores, brain cells, cancer cells, living tissue cells, and macro-objects including stereotactic neurosurgery instruments, weapons and explosives | 80 | 2002 | |
| 7,015,707 Micro probe | 107 | 2003 | |
| 2004/0193,382 Method and apparatus for calibrating a multiport test system for measurement of a DUT | 94 | 2004 | |
| 2006/0030,060 Apparatus and method for testing defects | 36 | 2005 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | May 17, 2013 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | May 17, 2017 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 17, 2021 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |