Method of manufacturing implantable wireless sensor for in vivo pressure measurement
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United States of America Patent
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Nov 24, 2009
Grant Date -
Dec 21, 2006
app pub date -
Aug 16, 2005
filing date -
Jun 21, 2005
priority date (Note) -
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Abstract
A method of manufacturing a sensor for in vivo applications includes the steps of providing two wafers of an electrically insulating material. A recess is formed in the first wafer, and a capacitor plate is formed in the recess of the first wafer. A second capacitor plate is formed in a corresponding region of the second wafer, and the two wafers are affixed to one another such that the first and second capacitor plates are arranged in parallel, spaced-apart relation.
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