dielectrics using a rapid curing process

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United States of America Patent

PATENT NO 7622399
APP PUB NO 20050064726A1
SERIAL NO

10796286

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Abstract

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A method of forming a low dielectric constant structure. The method comprises providing at a first temperature a dielectric material having a first dielectric constant and a first elastic modulus, and curing the dielectric material by a thermal curing process, in which the material is heated to a second temperature by increasing the temperature at an average rate of at least 1° C. per second. As a result a densified, dielectric material is obtained which has a low dielectric constant.

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Patent Owner(s)

Patent OwnerAddress
SILECS OYESPOO FINLAND ESPOO SOUTHERN FINLAND

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hackera, Nigel Espoo , FI 1 1
McLaughlin, William Espoo , FI 15 182
Pirilä, Nina Espoo , FI 1 1
Rantala, Juha Espoo , FI 43 313
Reid, Jason San Jose , US 15 1188

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