Spatial light modulator
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United States of America Patent
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Dec 8, 2009
Grant Date -
Apr 24, 2008
app pub date -
Oct 18, 2006
filing date -
Oct 18, 2006
priority date (Note) -
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Abstract
An interferometric spatial light modulator comprises of two cavities. One is the optical resonant cavity having a partially reflective film and a movable reflective membrane as two walls, and the other is the electromechanical actuation cavity having the movable reflective membrane and a bottom metal layer as electrodes. The spatial light modulator is built on silicon substrate and is actively addressed. A microdisplay apparatus of such spatial light modulators and a projection display system using such microdisplay are also disclosed.
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