Method of refining scrap silicon using an electron beam
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United States of America Patent
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Dec 15, 2009
Grant Date -
Jan 26, 2006
app pub date -
Jun 2, 2005
filing date -
Jun 3, 2004
priority date (Note) -
Expired
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Abstract
A method of refining scrap silicon using an electron beam includes a step of selectively preparing lumps of n-type scrap silicon containing a specific impurity element as a dopant, a step of crushing the prepared lumps of scrap silicon, a step of placing the crushed silicon into a vacuum vessel, a step of irradiating the crushed silicon which was placed into the vacuum vessel with an electron beam to melt it and vaporize at least a portion of the impurity element, and a step of solidifying the resulting silicon.
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