Method and device for detecting arcs
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United States of America Patent
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Dec 29, 2009
Grant Date -
Jul 19, 2007
app pub date -
Dec 19, 2006
filing date -
Dec 22, 2005
priority date (Note) -
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Abstract
An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.
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