Vaporized hydrogen peroxide probe calibration rig
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United States of America Patent
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Jan 5, 2010
Grant Date -
Oct 30, 2008
app pub date -
Apr 27, 2007
filing date -
Apr 27, 2007
priority date (Note) -
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Abstract
A method and apparatus for calibrating a sensor used to sense the concentration of vaporized hydrogen peroxide (VHP). A concentration of liquid hydrogen peroxide in an aqueous solution is determined and correlated with a corresponding concentration of vaporized hydrogen peroxide indicative of an “actual” vaporized hydrogen peroxide concentration. An error value is determined by comparing the “actual” vaporized hydrogen peroxide concentration to a “measured” vaporized hydrogen peroxide concentration, indicated by the sensor being calibrated. The error value is used to properly calibrate the sensor.
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