Apparatus for processing perfluorocarbon
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United States of America Patent
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Jan 5, 2010
Grant Date -
Oct 26, 2006
app pub date -
Jun 23, 2006
filing date -
Nov 14, 1997
priority date (Note) -
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Abstract
at a high temperature exhausted from the catalyst layer is cooled in a cooling apparatus. Subsequently, the exhaust gas is conducted to an acidic gas removing apparatus to remove HF. In this way, the silicon component is removed from the exhaust gas before introducing the exhaust gas into the catalyst layer. Therefore, the surface of the catalyst can be utilized effectively, and the decomposition reaction of the perfluoride compound can be improved.
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