Multiple beam micro-machining system and method
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United States of America Patent
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Jan 5, 2010
Issued Date -
N/A
app pub date -
Jun 13, 2002
filing date -
Jun 13, 2001
priority date (Note) -
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Abstract
A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
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