Microelectromechanical system having a dielectric movable membrane and a mirror
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United States of America Patent
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Jan 5, 2010
Grant Date -
Nov 13, 2008
app pub date -
May 9, 2007
filing date -
May 9, 2007
priority date (Note) -
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Abstract
A microelectromechanical (MEMS) device includes at least one electrode, a first reflective layer, and a movable functional element. The movable functional element includes a flexible dielectric layer and a reflective element. The flexible dielectric layer flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer. The reflective element has a first portion mechanically coupled to the flexible dielectric layer and a second portion spaced from the flexible dielectric layer and defining a gap therebetween.
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