Shadow mask deposition of materials using reconfigurable shadow masks
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United States of America Patent
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Jan 12, 2010
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N/A
app pub date -
Jun 19, 2007
filing date -
Jun 8, 2005
priority date (Note) -
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Abstract
A shadow mask deposition system includes a plurality of identical shadow masks arranged in a number of stacks to form a like number of compound shadow masks, each of which is disposed in a deposition vacuum vessel along with a material deposition source. Materials from the material deposition sources are deposited on the substrate via openings in corresponding compound shadow masks, each opening being formed by the whole or partial alignment of apertures in the shadow masks forming the compound shadow mask, to form an array of electronic elements on the substrate.
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