Deformable mirror device with oscillating states
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United States of America Patent
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Jan 12, 2010
Grant Date -
Jul 24, 2008
app pub date -
Dec 24, 2007
filing date -
Dec 26, 2006
priority date (Note) -
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Abstract
A mirror device which deflects incident light includes: a mirror arranged on a substrate and supported by a hinge; an address electrode deflecting the mirror to an ON state, an OFF state, or an oscillating state; a drive circuit applying a voltage to the address electrode; and a first stopper unit determining an oscillation amplitude in the oscillating state.
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