Slit coater with a standby unit for a nozzle and a coating method using the same
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United States of America Patent
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Jan 19, 2010
Grant Date -
Jul 6, 2006
app pub date -
Aug 19, 2005
filing date -
Dec 31, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A slit coater with a standby unit for a nozzle and a coating method using the same prevents environmental pollution by solvent steam and simultaneously maintains the slit nozzle in an optimum state. When in standby and not performing a coating application, the slit nozzle is kept in a standby unit having a solvent atmosphere therein. The slit coater includes: a table on which an object to be processed is positioned; a slit nozzle for applying a coating solution onto a surface of the object; and a standby unit into which the slit nozzle is loaded when on standby, and having a shutter at the opening thereof to maintain an inner space in a substantially hermetically sealed solvent atmosphere. The atmosphere in the standby unit is configured to prevent hardening of the coating solution in the slit nozzle and thereby maintain the slit nozzle in the optimum state for providing coating applications.
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