Semiconductor structure including mixed rare earth oxide formed on silicon

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United States of America Patent

PATENT NO 7648864
SERIAL NO

12197079

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Abstract

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A method (and resultant structure) of forming a semiconductor structure, includes forming a mixed rare earth oxide on silicon. The mixed rare earth oxide is lattice-matched to silicon.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bojarczuk,, Jr Nestor Alexander Poughkeepsie, US 2 12
Buchanan, Douglas Andrew Cortlandt Manor, US 11 194
Guha, Supratik Chappaqua, US 146 2312
Narayanan, Vijay New York, US 308 5551
Ragnarsson, Lars-Ake New York, US 23 790

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