Micromirror device with a single address electrode
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United States of America Patent
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-
Jan 19, 2010
Grant Date -
Sep 11, 2008
app pub date -
Feb 25, 2008
filing date -
Feb 26, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting any each of the mirrors to be deflectable in a plurality of directions, an electrode arranged to face the mirror, and a driving circuit, which is connected to the mirror via the elastic hinge, for applying to the mirror an address voltage for independently controlling the deflection of the mirror.
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