Multiple layer alignment sensing
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United States of America Patent
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-
Jan 19, 2010
Grant Date -
May 25, 2006
app pub date -
Nov 23, 2004
filing date -
Nov 23, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Using an imaging system in relation to a plurality of material layers is described, the material layers being separated by a distance greater than a depth of field of the imaging system. A focal plane of the imaging system and a first of the plurality of material layers are brought into correspondence. A first image including at least a portion of the first material layer having a first feature of interest thereon is stored. The focal plane of the imaging system and a second of the plurality of material layers are brought into correspondence. A second image including at least a portion of the second material layer having a second feature of interest thereon is acquired. The first and second images are processed for automatic computation of an alignment measurement between the first and second features of interest.
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