Large area substrate transferring method for aligning with horizontal actuation of lever arm
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United States of America Patent
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Jan 26, 2010
Grant Date -
Jun 21, 2007
app pub date -
Jan 8, 2007
filing date -
Oct 20, 2003
priority date (Note) -
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Abstract
A load lock chamber and method for transferring large area substrates is provided. In one embodiment, a load lock chamber suitable for transferring large area substrates includes a plurality of vertically stacked single substrate transfer chambers. The configuration of vertically stacked single substrate transfer chambers contributes to reduced size and greater throughput as compared to conventional state of the art, dual slot dual substrate designs. Moreover, the increased throughput has been realized at reduced pumping and venting rates, which corresponds to reduced probability of substrate contamination due to particulates and condensation.
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