MEMS device with integrated optical element
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United States of America Patent
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Jan 26, 2010
Grant Date -
Dec 13, 2007
app pub date -
Jan 23, 2007
filing date -
Jan 27, 2006
priority date (Note) -
In Force
status (Latency Note)
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Abstract
MEMS devices are fabricated by a method that involves forming an optical element (e.g., etalon) over a substrate and then forming a light modulating element (e.g., interferometric modulator) over the optical element. In an embodiment, a support structure for the light modulating element is aligned with the underlying optical element to thereby alter the appearance of the support structure to a viewer. Such an optical element is separated from the support structure by one or more buffer layers.
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