Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
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United States of America Patent
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Feb 2, 2010
Grant Date -
Jul 19, 2007
app pub date -
Jan 13, 2005
filing date -
Feb 24, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed.More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.
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