Plating bath and surface treatment compositions for thin film deposition
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United States of America Patent
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Feb 2, 2010
Grant Date -
Nov 16, 2006
app pub date -
May 15, 2006
filing date -
May 13, 2005
priority date (Note) -
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Abstract
An aqueous substrate surface treatment composition includes cysteine and an acidic solution having a pH of about 7 or less. The composition enables a selective deposition of a metal ion sensitizer and a subsequent selective plating of a metallic cap layer. Various CoWP plating bath compositions are also provided which may be used to form the cap layer.
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