Tandem process chamber
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United States of America Patent
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Feb 2, 2010
Grant Date -
Apr 15, 2004
app pub date -
Oct 6, 2003
filing date -
Nov 18, 1996
priority date (Note) -
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Abstract
The present invention provides an apparatus for vacuum processing generally comprising an enclosure having a plurality of isolated chambers formed therein, a gas distribution assembly disposed in each processing chamber, a gas source connected to the plurality of isolated chambers, and a power supply connected to each gas distribution assembly.
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