Pattern inspection apparatus, pattern inspection method, and recording medium

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United States of America Patent

PATENT NO 7660455
APP PUB NO 20050226494A1
SERIAL NO

11044159

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Abstract

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can be obtained as one of the pattern deformation quantities.

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Patent Owner(s)

Patent OwnerAddress
TASMIT INC2-6-23 SHIN-YOKOHAMA KOHOKU-KU YOKOHAMA-SHI KANAGAWA 222-0033

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kitamura, Tadashi Kawasaki, JP 30 767
Yamamoto, Masahiro Kawasaki, JP 417 4890

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