Methods and devices for inhibiting tilting of a movable element in a MEMS device
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United States of America Patent
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Feb 16, 2010
Grant Date -
May 15, 2008
app pub date -
Jan 15, 2008
filing date -
Sep 27, 2004
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Abstract
Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.
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