Transfer chamber for flat display device manufacturing apparatus
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United States of America Patent
Stats
-
Feb 23, 2010
Grant Date -
Nov 27, 2008
app pub date -
May 29, 2008
filing date -
Nov 4, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may provide a combination of the functions of a transfer and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, a buffer may be provided and be driven without interference with the robot, and an aligner may be provided to adjust a position of a substrate mounted on the buffer. A sealing member may be provided to seal a hole formed at a predetermined portion of the transfer chamber.
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