System to transfer a template transfer body between a motion stage and a docking plate
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United States of America Patent
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Feb 23, 2010
Grant Date -
Mar 29, 2007
app pub date -
Aug 25, 2005
filing date -
Aug 25, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.
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