Perfluoride processing apparatus
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United States of America Patent
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Feb 23, 2010
Grant Date -
Aug 18, 2005
app pub date -
Apr 19, 2005
filing date -
May 31, 2002
priority date (Note) -
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Abstract
with the semiconductor fabrication apparatus or the liquid crystal manufacturing apparatus installed therein, thus enabling size reduction or “downsizing” of the clean room. It is possible to reduce the size of a clean room in which a semiconductor fabricating apparatus or a liquid crystal manufacturing apparatus is installed.
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